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Narushima, Takayuki, Goto, Takashi, Hagiwara, Jun, Iguchi, Yasutaka, Hirai, Toshio (1994) High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Nitride in a Carbon Monoxide-Carbon Dioxide Atmosphere. Journal of the American Ceramic Society, 77 (11). 2921-2925 doi:10.1111/j.1151-2916.1994.tb04525.x

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Reference TypeJournal (article/letter/editorial)
TitleHigh-Temperature Oxidation of Chemically Vapor-Deposited Silicon Nitride in a Carbon Monoxide-Carbon Dioxide Atmosphere
JournalJournal of the American Ceramic Society
AuthorsNarushima, TakayukiAuthor
Goto, TakashiAuthor
Hagiwara, JunAuthor
Iguchi, YasutakaAuthor
Hirai, ToshioAuthor
Year1994 (November)Volume77
Issue11
PublisherWiley
DOIdoi:10.1111/j.1151-2916.1994.tb04525.xSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID4091561Long-form Identifiermindat:1:5:4091561:4
GUID0
Full ReferenceNarushima, Takayuki, Goto, Takashi, Hagiwara, Jun, Iguchi, Yasutaka, Hirai, Toshio (1994) High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Nitride in a Carbon Monoxide-Carbon Dioxide Atmosphere. Journal of the American Ceramic Society, 77 (11). 2921-2925 doi:10.1111/j.1151-2916.1994.tb04525.x
Plain TextNarushima, Takayuki, Goto, Takashi, Hagiwara, Jun, Iguchi, Yasutaka, Hirai, Toshio (1994) High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Nitride in a Carbon Monoxide-Carbon Dioxide Atmosphere. Journal of the American Ceramic Society, 77 (11). 2921-2925 doi:10.1111/j.1151-2916.1994.tb04525.x
In(1994, November) Journal of the American Ceramic Society Vol. 77 (11) Wiley

See Also

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Narushima, Takayuki, Goto, Takashi, Yokoyama, Yoshio, Hagiwara, Jun, Iguchi, Yasutaka, Hirai, Toshio (1994) High-Temperature Active Oxidation and Active-to-Passive Transition of Chemically Vapor-Deposited Silicon Nitride in N2-O2 and Ar-O2 Atmospheres. Journal of the American Ceramic Society, 77 (9). 2369-2375 doi:10.1111/j.1151-2916.1994.tb04607.x
Narushima, Takayuki, Goto, Takashi, Yokoyama, Yoshio, Takeuchi, Masahito, Iguchi, Yasutaka, Hirai, Toshio (1994) Active-to-Passive Transition and Bubble Formation for High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Carbide in CO-CO2 Atmosphere. Journal of the American Ceramic Society, 77 (4). 1079-1082 doi:10.1111/j.1151-2916.1994.tb07273.x
Narushima, Takayuki, Goto, Takashi, Iguchi, Yasutaka, Hirai, Toshio (1991) High-Temperature Active Oxidation of Chemically Vapor-Deposited Silicon Carbide in an ArO2 Atmosphere. Journal of the American Ceramic Society, 74 (10). 2583-2586 doi:10.1111/j.1151-2916.1991.tb06803.x
Narushima, Takayuki, Goto, Takashi, Yokoyama, Yoshio, Iguchi, Yasutaka, Hirai, Toshio (1993) High-Temperature Active Oxidation of Chemically Vapor-Deposited Silicon Carbide in COCO2 Atmosphere. Journal of the American Ceramic Society, 76 (10). 2521-2524 doi:10.1111/j.1151-2916.1993.tb03975.x
Narushima, Takayuki, Goto, Takashi, Iguchi, Yasutaka, Hirai, Toshio (1990) High-Temperature Oxidation of Chemically Vapor-Deposited Silicon Carbide in Wet Oxygen at 1823 to 1923 K. Journal of the American Ceramic Society, 73 (12). 3580-3584 doi:10.1111/j.1151-2916.1990.tb04261.x
Narushima, Takayuki, Goto, Takashi, Hirai, Toshio (1989) High-Temperature Passive Oxidation of Chemically Vapor Deposited Silicon Carbide. Journal of the American Ceramic Society, 72 (8). 1386-1390 doi:10.1111/j.1151-2916.1989.tb07658.x
Narushima, Takayuki, Lin, Ray Y., Iguchi, Yasutaka, Hirai, Toshio (1993) Oxidation of Chemically Vapor-Deposited Silicon Nitride in Dry Oxygen at 1923 to 2003 K. Journal of the American Ceramic Society, 76 (4). 1047-1051 doi:10.1111/j.1151-2916.1993.tb05333.x
Opila, Elizabeth J. (1994) Oxidation Kinetics of Chemically Vapor-Deposited Silicon Carbide in Wet Oxygen. Journal of the American Ceramic Society, 77 (3). 730-736 doi:10.1111/j.1151-2916.1994.tb05357.x
Goto, Takashi, Narushima, Takayuki, Iguchi, Yasutaka, Hirai, Toshio (1994) Active to Passive Transition in the High-Temperature Oxidation of CVD SiC and Si3N4. In NATO Science Series E: (closed). Springer Netherlands. p.165-176. doi:10.1007/978-94-011-1182-9_13
Opila, Elizabeth J., Nguyen, QuynhGiao N. (2005) Oxidation of Chemically-Vapor-Deposited Silicon Carbide in Carbon Dioxide. Journal of the American Ceramic Society, 81 (7). 1949-1952 doi:10.1111/j.1151-2916.1998.tb02573.x
Narushima, Takayuki, Kato, Michihisa, Murase, Shin, Ouchi, Chiaki, Iguchi, Yasutaka (2002) Oxidation of Silicon and Silicon Carbide in Ozone-Containing Atmospheres at 973 K. Journal of the American Ceramic Society, 85 (8). 2049-2055 doi:10.1111/j.1151-2916.2002.tb00402.x
 
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