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Lee, Soo-Young (2005) A flexible and efficient approach to E-beam proximity effect correction—PYRAMID. Surface and Interface Analysis, 37 (11). 919-926 doi:10.1002/sia.2110

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Reference TypeJournal (article/letter/editorial)
TitleA flexible and efficient approach to E-beam proximity effect correction—PYRAMID
JournalSurface and Interface Analysis
AuthorsLee, Soo-YoungAuthor
Year2005 (November)Volume37
Issue11
PublisherWiley
DOIdoi:10.1002/sia.2110Search in ResearchGate
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Mindat Ref. ID6509505Long-form Identifiermindat:1:5:6509505:6
GUID0
Full ReferenceLee, Soo-Young (2005) A flexible and efficient approach to E-beam proximity effect correction—PYRAMID. Surface and Interface Analysis, 37 (11). 919-926 doi:10.1002/sia.2110
Plain TextLee, Soo-Young (2005) A flexible and efficient approach to E-beam proximity effect correction—PYRAMID. Surface and Interface Analysis, 37 (11). 919-926 doi:10.1002/sia.2110
In(2005, November) Surface and Interface Analysis Vol. 37 (11) Wiley

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