Villarrubia, J. S., Vladár, A. E., Postek, M. T. (2005) Scanning electron microscope dimensional metrology using a model-based library. Surface and Interface Analysis, 37 (11). 951-958 doi:10.1002/sia.2087

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Reference Type	Journal (article/letter/editorial)
Title	Scanning electron microscope dimensional metrology using a model-based library
Journal	Surface and Interface Analysis
Authors	Villarrubia, J. S.		Author
	Vladár, A. E.		Author
	Postek, M. T.		Author
Year	2005 (November)	Volume	37
Issue	11
Publisher	Wiley
DOI	doi:10.1002/sia.2087Search in ResearchGate
	Generate Citation Formats
Mindat Ref. ID	6509459	Long-form Identifier	mindat:1:5:6509459:8
GUID	0
Full Reference	Villarrubia, J. S., Vladár, A. E., Postek, M. T. (2005) Scanning electron microscope dimensional metrology using a model-based library. Surface and Interface Analysis, 37 (11). 951-958 doi:10.1002/sia.2087
Plain Text	Villarrubia, J. S., Vladár, A. E., Postek, M. T. (2005) Scanning electron microscope dimensional metrology using a model-based library. Surface and Interface Analysis, 37 (11). 951-958 doi:10.1002/sia.2087
In	(2005, November) Surface and Interface Analysis Vol. 37 (11) Wiley

	*Postek, Michael T., Vladár, András E. (2011) Modeling for accurate dimensional scanning electron microscope metrology: then and now. Scanning, 33 (3). 111-125 doi:10.1002/sca.20238*
	Postek, Michael T., Vladár, András E., Lowney, Jeremiah R., Keery, William J. (2006) Two-dimensional simulation and modeling in scanning electron microscope imaging and metrology research. Scanning, 24 (4). 179-185 doi:10.1002/sca.4950240404
	Postek, Michael T., Vladár, András E., Villarrubia, John S., Muto, Atsushi (2016) Comparison of Electron Imaging Modes for Dimensional Measurements in the Scanning Electron Microscope. Microscopy and Microanalysis, 22 (4). 768-777 doi:10.1017/s1431927616011430
	Postek, Michael T., Villarrubia, John, Vladár, András E., Muto, Atsushi (2016) Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope - Part 2. Microscopy and Microanalysis, 22. 608-609 doi:10.1017/s1431927616003895
	Vladár, AE, Cizmar, P, Postek, MT (2008) Scanning Electron and Ion Microscope-based Size and Shape Metrology at the Nanometer Scale. Microscopy and Microanalysis, 14. 118-119 doi:10.1017/s1431927608087849
	*Vladár, András E., Postek, Michael T., Davilla, Scott D. (2006) Is your scanning electron microscope Hi-Fi?. Scanning, 17 (5). 287-295 doi:10.1002/sca.4950170504*
	Tondare, Vipin N., Villarrubia, John S., Vladár, András E. (2017) Three-Dimensional (3D) Nanometrology Based on Scanning Electron Microscope (SEM) Stereophotogrammetry. Microscopy and Microanalysis, 23 (5). 967-977 doi:10.1017/s1431927617012521
	*Vladár, AndráS E., Radi, Zsolt, Postek, Michael T., Joy, David C. (2006) Nanotip electron gun for the scanning electron microscope. Scanning, 28 (3). 133-141 doi:10.1002/sca.4950280301*
	Postek, Michael T., Vladár, András E. (2006) New application of variable-pressure/environmental microscopy to semiconductor inspection and metrology. Scanning, 26 (1). 11-17 doi:10.1002/sca.4950260103
	Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S. (2015) Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library. Ultramicroscopy, 154. 15-28 doi:10.1016/j.ultramic.2015.01.004
	*Postek, Michael T., Vladár, András E. (2006) Digital imaging for scanning electron microscopy. Scanning, 18 (1). 1-7 doi:10.1002/sca.1996.4950180101*

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Villarrubia, J. S., Vladár, A. E., Postek, M. T. (2005) Scanning electron microscope dimensional metrology using a model-based library. Surface and Interface Analysis, 37 (11). 951-958 doi:10.1002/sia.2087

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