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Ricciardi, C., Primiceli, A., Germani, G., Rusconi, A., Giorgis, F. (2006) Microstructure analysis of a-SiC:H thin films grown by high-growth-rate PECVD. Journal of Non-Crystalline Solids, 352 (9) 1380-1383 doi:10.1016/j.jnoncrysol.2005.11.137

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Reference TypeJournal (article/letter/editorial)
TitleMicrostructure analysis of a-SiC:H thin films grown by high-growth-rate PECVD
JournalJournal of Non-Crystalline Solids
AuthorsRicciardi, C.Author
Primiceli, A.Author
Germani, G.Author
Rusconi, A.Author
Giorgis, F.Author
Year2006 (June)Volume352
Issue9
PublisherElsevier BV
DOIdoi:10.1016/j.jnoncrysol.2005.11.137Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID644385Long-form Identifiermindat:1:5:644385:0
GUID0
Full ReferenceRicciardi, C., Primiceli, A., Germani, G., Rusconi, A., Giorgis, F. (2006) Microstructure analysis of a-SiC:H thin films grown by high-growth-rate PECVD. Journal of Non-Crystalline Solids, 352 (9) 1380-1383 doi:10.1016/j.jnoncrysol.2005.11.137
Plain TextRicciardi, C., Primiceli, A., Germani, G., Rusconi, A., Giorgis, F. (2006) Microstructure analysis of a-SiC:H thin films grown by high-growth-rate PECVD. Journal of Non-Crystalline Solids, 352 (9) 1380-1383 doi:10.1016/j.jnoncrysol.2005.11.137
In(2006, June) Journal of Non-Crystalline Solids Vol. 352 (9) Elsevier BV

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Losurdo, M., Giangregorio, M.M., Sacchetti, A., Capezzuto, P., Bruno, G., Càrabe, J., Gandìa, J.J., Urbina, L. (2006) Dynamics of low temperature PECVD growth of microcrystalline silicon thin films: Impact of substrate surface treatments. Journal of Non-Crystalline Solids, 352 (9) 906-910 doi:10.1016/j.jnoncrysol.2005.09.039
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