Kukushkin, S. A., Osipov, A. V., Romanychev, A. I. (2016) Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates. Physics of the Solid State, 58. 1448-1452 doi:10.1134/s1063783416070246
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates | ||
| Journal | Physics of the Solid State | ||
| Authors | Kukushkin, S. A. | Author | |
| Osipov, A. V. | Author | ||
| Romanychev, A. I. | Author | ||
| Year | 2016 (July) | Volume | 58 |
| Publisher | Pleiades Publishing Ltd | ||
| DOI | doi:10.1134/s1063783416070246Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 6156741 | Long-form Identifier | mindat:1:5:6156741:2 |
| GUID | 0 | ||
| Full Reference | Kukushkin, S. A., Osipov, A. V., Romanychev, A. I. (2016) Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates. Physics of the Solid State, 58. 1448-1452 doi:10.1134/s1063783416070246 | ||
| Plain Text | Kukushkin, S. A., Osipov, A. V., Romanychev, A. I. (2016) Epitaxial growth of zinc oxide by the method of atomic layer deposition on SiC/Si substrates. Physics of the Solid State, 58. 1448-1452 doi:10.1134/s1063783416070246 | ||
| In | (n.d.) Physics of the Solid State Vol. 58. Pleiades Publishing Ltd | ||
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