Hanamoto, K, Yoshimoto, H, Hosono, T, Hirai, A, Kido, Y, Nakayama, Y, Kaigawa, R (1998) Anomalous depth profile of implanted fluorine ions in SiO2/Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 140 (1). 124-128 doi:10.1016/s0168-583x(98)00107-4
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Anomalous depth profile of implanted fluorine ions in SiO2/Si | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Hanamoto, K | Author | |
| Yoshimoto, H | Author | ||
| Hosono, T | Author | ||
| Hirai, A | Author | ||
| Kido, Y | Author | ||
| Nakayama, Y | Author | ||
| Kaigawa, R | Author | ||
| Year | 1998 (April) | Volume | 140 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/s0168-583x(98)00107-4Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5615045 | Long-form Identifier | mindat:1:5:5615045:8 |
| GUID | 0 | ||
| Full Reference | Hanamoto, K, Yoshimoto, H, Hosono, T, Hirai, A, Kido, Y, Nakayama, Y, Kaigawa, R (1998) Anomalous depth profile of implanted fluorine ions in SiO2/Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 140 (1). 124-128 doi:10.1016/s0168-583x(98)00107-4 | ||
| Plain Text | Hanamoto, K, Yoshimoto, H, Hosono, T, Hirai, A, Kido, Y, Nakayama, Y, Kaigawa, R (1998) Anomalous depth profile of implanted fluorine ions in SiO2/Si. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 140 (1). 124-128 doi:10.1016/s0168-583x(98)00107-4 | ||
| In | (1998, April) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 140 (1) Elsevier BV | ||
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