Reutov, V.F. (1998) Methods of obtaining a uniform volume concentration of implanted ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 140 (3). 433-438 doi:10.1016/s0168-583x(98)00103-7
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Methods of obtaining a uniform volume concentration of implanted ions | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Reutov, V.F. | Author | |
| Year | 1998 (May) | Volume | 140 |
| Issue | 3 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/s0168-583x(98)00103-7Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5615079 | Long-form Identifier | mindat:1:5:5615079:5 |
| GUID | 0 | ||
| Full Reference | Reutov, V.F. (1998) Methods of obtaining a uniform volume concentration of implanted ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 140 (3). 433-438 doi:10.1016/s0168-583x(98)00103-7 | ||
| Plain Text | Reutov, V.F. (1998) Methods of obtaining a uniform volume concentration of implanted ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 140 (3). 433-438 doi:10.1016/s0168-583x(98)00103-7 | ||
| In | (1998, May) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 140 (3) Elsevier BV | ||
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