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Tollet, H., Bielen, P., Creemers, C., Van Hove, H., Neyens, A., Maex, K., De Keersmaecker, R. F. (1986) ISS-study of dopant redistribution in TiSi2 layers during silicidation by rapid thermal processing. Surface and Interface Analysis, 9 (5). 338-339 doi:10.1002/sia.740090521

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Reference TypeJournal (article/letter/editorial)
TitleISS-study of dopant redistribution in TiSi2 layers during silicidation by rapid thermal processing
JournalSurface and Interface Analysis
AuthorsTollet, H.Author
Bielen, P.Author
Creemers, C.Author
Van Hove, H.Author
Neyens, A.Author
Maex, K.Author
De Keersmaecker, R. F.Author
Year1986 (July)Volume9
Issue5
PublisherWiley
DOIdoi:10.1002/sia.740090521Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID6501070Long-form Identifiermindat:1:5:6501070:9
GUID0
Full ReferenceTollet, H., Bielen, P., Creemers, C., Van Hove, H., Neyens, A., Maex, K., De Keersmaecker, R. F. (1986) ISS-study of dopant redistribution in TiSi2 layers during silicidation by rapid thermal processing. Surface and Interface Analysis, 9 (5). 338-339 doi:10.1002/sia.740090521
Plain TextTollet, H., Bielen, P., Creemers, C., Van Hove, H., Neyens, A., Maex, K., De Keersmaecker, R. F. (1986) ISS-study of dopant redistribution in TiSi2 layers during silicidation by rapid thermal processing. Surface and Interface Analysis, 9 (5). 338-339 doi:10.1002/sia.740090521
In(1986, July) Surface and Interface Analysis Vol. 9 (5) Wiley

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Krooshof, G. J. P., Habraken, F. H. P. M., van der Weg, W. F., Van den hove, L., Maex, K., De Keersmaecker, R. F. (1988) Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. I. Ti on Si. Journal of Applied Physics, 63 (10). 5104-5109 doi:10.1063/1.340410
Krooshof, G. J. P., Habraken, F. H. P. M., van der Weg, W. F., Van den hove, L., Maex, K., De Keersmaecker, R. F. (1988) Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. II. Ti on SiO2. Journal of Applied Physics, 63 (10). 5110-5114 doi:10.1063/1.340411
Van Den Hove, L., Maex, K., Hobbs, L., Pippens, P., De Keersmaecker, R., Probst, V., Schaber, H. (1989) Comparison between CoSi2 and TiSi2 as dopant source for shallow silicided junction formation. Applied Surface Science, 38. 430-440 doi:10.1016/0169-4332(89)90564-3
Creemers, C., Royer, D., Schryvers, P. (1993) Automatic analysis of ISS?spectra. Surface and Interface Analysis, 20 (3). 233-242 doi:10.1002/sia.740200308
Maex, K., De Keersmaecker, R.F. (1985) Rapid thermal processing for simultaneous annealing of shallow implanted junctions and formation of their TiSi2 contacts. Physica B+C, 129 (1). 192-196 doi:10.1016/0378-4363(85)90567-4
Bertolini, J.C., Massardier, J., Delichere, P., Tardy, B., Imelik, B., Jugnet, Y., Duc, TranMinh, De Temmerman, L., Creemers, C., Van Hove, H., Neyens, A. (1982) Pt10Ni90(111) single crystal alloy: Determination of the surface composition by AES, XPS and ISS. Surface Science Letters, 119 (1). doi:10.1016/0167-2584(82)90669-7
de Temmerman, L., Creemers, C., Van Hove, H., Neyens, A., Bertolini, J.C., Massardier, J. (1986) Experimental determination of equilibrium surface segregation in Pt-Ni single crystal alloys. Surface Science Letters, 178 (1). doi:10.1016/0167-2584(86)90213-6
Bertolini, J.C., Massardier, J., Delichere, P., Tardy, B., Imelik, B., Jugnet, Y., Duc, Tran Minh, De Temmerman, L., Creemers, C., Van Hove, H., Neyens, A. (1982) Pt10Ni10(111) single crystal alloy: Determination of the surface composition by AES, XPS and ISS. Surface Science, 119 (1). 95-106 doi:10.1016/0039-6028(82)90190-x
De Temmerman, L., Creemers, C., Van Hove, H., Neyens, A., Bertolini, J.C., Massardier, J. (1986) Experimental determination of equilibrium surface segregation in Pt-Ni single crystal alloys. Surface Science, 178 (1). 888-896 doi:10.1016/0039-6028(86)90365-1
Duvigneaud, P. H., Hennaut, P. F., Laudet, A., Terryn, H., Vereecken, J. (1986) AES study of thermal behaviour of Sb-doped Sn-oxide coatings. Surface and Interface Analysis, 9 (5). 332 doi:10.1002/sia.740090516
Bubert, H., Garten, R. P. H., Puderbach, H., Storp, S. (1986) Quantitative analysis of conversion layers on aluminium. Surface and Interface Analysis, 9 (6). 384 doi:10.1002/sia.740090608
 
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