Ito, H., Hori, K., Saitoh, H. (2006) Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage. Journal of Non-Crystalline Solids, 352 (1) 1-7 doi:10.1016/j.jnoncrysol.2005.11.015
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Ito, H. | Author | |
| Hori, K. | Author | ||
| Saitoh, H. | Author | ||
| Year | 2006 (January) | Volume | 352 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.jnoncrysol.2005.11.015Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 643445 | Long-form Identifier | mindat:1:5:643445:2 |
| GUID | 0 | ||
| Full Reference | Ito, H., Hori, K., Saitoh, H. (2006) Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage. Journal of Non-Crystalline Solids, 352 (1) 1-7 doi:10.1016/j.jnoncrysol.2005.11.015 | ||
| Plain Text | Ito, H., Hori, K., Saitoh, H. (2006) Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage. Journal of Non-Crystalline Solids, 352 (1) 1-7 doi:10.1016/j.jnoncrysol.2005.11.015 | ||
| In | (2006, January) Journal of Non-Crystalline Solids Vol. 352 (1) Elsevier BV | ||
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