Khoshman, Jebreel M., Kordesch, Martin E. (2005) Optical characterization of sputtered amorphous aluminum nitride thin films by spectroscopic ellipsometry. Journal of Non-Crystalline Solids, 351 (40) 3334-3340 doi:10.1016/j.jnoncrysol.2005.08.009
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Optical characterization of sputtered amorphous aluminum nitride thin films by spectroscopic ellipsometry | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Khoshman, Jebreel M. | Author | |
| Kordesch, Martin E. | Author | ||
| Year | 2005 (October) | Volume | 351 |
| Issue | 40 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.jnoncrysol.2005.08.009Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 643268 | Long-form Identifier | mindat:1:5:643268:7 |
| GUID | 0 | ||
| Full Reference | Khoshman, Jebreel M., Kordesch, Martin E. (2005) Optical characterization of sputtered amorphous aluminum nitride thin films by spectroscopic ellipsometry. Journal of Non-Crystalline Solids, 351 (40) 3334-3340 doi:10.1016/j.jnoncrysol.2005.08.009 | ||
| Plain Text | Khoshman, Jebreel M., Kordesch, Martin E. (2005) Optical characterization of sputtered amorphous aluminum nitride thin films by spectroscopic ellipsometry. Journal of Non-Crystalline Solids, 351 (40) 3334-3340 doi:10.1016/j.jnoncrysol.2005.08.009 | ||
| In | (2005, October) Journal of Non-Crystalline Solids Vol. 351 (40) Elsevier BV | ||
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