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Zuniga, C (2003) Carbon films deposited by low frequency plasma as inter-metal dielectric. Journal of Non-Crystalline Solids, 329 (1) 174-178 doi:10.1016/j.jnoncrysol.2003.08.036

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Reference TypeJournal (article/letter/editorial)
TitleCarbon films deposited by low frequency plasma as inter-metal dielectric
JournalJournal of Non-Crystalline Solids
AuthorsZuniga, CAuthor
Year2003 (November 1)Volume329
Issue1
PublisherElsevier BV
DOIdoi:10.1016/j.jnoncrysol.2003.08.036Search in ResearchGate
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Mindat Ref. ID641682Long-form Identifiermindat:1:5:641682:3
GUID0
Full ReferenceZuniga, C (2003) Carbon films deposited by low frequency plasma as inter-metal dielectric. Journal of Non-Crystalline Solids, 329 (1) 174-178 doi:10.1016/j.jnoncrysol.2003.08.036
Plain TextZuniga, C (2003) Carbon films deposited by low frequency plasma as inter-metal dielectric. Journal of Non-Crystalline Solids, 329 (1) 174-178 doi:10.1016/j.jnoncrysol.2003.08.036
In(2003, November) Journal of Non-Crystalline Solids Vol. 329 (1) Elsevier BV

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Monteil, C., Cros, B., Berjoan, R., Durand, J. (1992) Structural investigations on low-frequency, low-temperature, plasma-deposited a-SiNx: H films. Journal of Non-Crystalline Solids, 151 (1) 32-38 doi:10.1016/0022-3093(92)90006-6
Dai, Haiyang, Chen, Jing, Xue, Renzhong, Li, Tao, Chen, Zhenping (2013) Analysis of hydrogenated amorphous carbon films deposited by middle frequency pulsed unbalanced magnetron sputtering. Journal of Non-Crystalline Solids, 363. 77-83 doi:10.1016/j.jnoncrysol.2012.12.012
Zorrilla, C (2003) Symmetry classification of cubic twist grain boundaries. Journal of Non-Crystalline Solids, 329 (1) 119-122 doi:10.1016/j.jnoncrysol.2003.08.024
Ambrosio, R., Torres, A., Kosarev, A., Ilinski, A., Zúñiga, C., Abramov, A.S. (2004) Low frequency plasma deposition and characterization of Si1−xGex:H,F films. Journal of Non-Crystalline Solids, 338. 91-96 doi:10.1016/j.jnoncrysol.2004.02.028
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