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Armaou, Antonios, Baker, James, D. Christofides, Panagiotis (2001) Feedback control of plasma etching reactors for improved etching uniformity. Chemical Engineering Science, 56 (4). 1467-1475 doi:10.1016/s0009-2509(00)00372-9

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Reference TypeJournal (article/letter/editorial)
TitleFeedback control of plasma etching reactors for improved etching uniformity
JournalChemical Engineering Science
AuthorsArmaou, AntoniosAuthor
Baker, JamesAuthor
D. Christofides, PanagiotisAuthor
Year2001 (February)Volume56
Issue4
PublisherElsevier BV
DOIdoi:10.1016/s0009-2509(00)00372-9Search in ResearchGate
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Mindat Ref. ID6287529Long-form Identifiermindat:1:5:6287529:3
GUID0
Full ReferenceArmaou, Antonios, Baker, James, D. Christofides, Panagiotis (2001) Feedback control of plasma etching reactors for improved etching uniformity. Chemical Engineering Science, 56 (4). 1467-1475 doi:10.1016/s0009-2509(00)00372-9
Plain TextArmaou, Antonios, Baker, James, D. Christofides, Panagiotis (2001) Feedback control of plasma etching reactors for improved etching uniformity. Chemical Engineering Science, 56 (4). 1467-1475 doi:10.1016/s0009-2509(00)00372-9
In(2001, February) Chemical Engineering Science Vol. 56 (4) Elsevier BV

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Armaou, Antonios, Christofides, Panagiotis D. (1999) Plasma enhanced chemical vapor deposition: Modeling and control. Chemical Engineering Science, 54 (15). 3305-3314 doi:10.1016/s0009-2509(98)00458-8
Armaou, Antonios, Christofides, Panagiotis D. (2000) Wave suppression by nonlinear finite-dimensional control. Chemical Engineering Science, 55 (14). 2627-2640 doi:10.1016/s0009-2509(99)00544-8
Armaou, Antonios, Christofides, Panagiotis D. (2002) Dynamic optimization of dissipative PDE systems using nonlinear order reduction. Chemical Engineering Science, 57 (24). 5083-5114 doi:10.1016/s0009-2509(02)00419-0
Antoniades, Charalambos, D. Christofides, Panagiotis (2001) Integrating nonlinear output feedback control and optimal actuator/sensor placement for transport-reaction processes. Chemical Engineering Science, 56 (15). 4517-4535 doi:10.1016/s0009-2509(01)00123-3
H. El-Farra, Nael, D. Christofides, Panagiotis (2001) Integrating robustness, optimality and constraints in control of nonlinear processes. Chemical Engineering Science, 56 (5). 1841-1868 doi:10.1016/s0009-2509(00)00530-3
Christofides, Panagiotis D., Armaou, Antonios (2005) Control of Multiscale and Distributed Process Systems. Computers & Chemical Engineering, 29. 687-688 doi:10.1016/j.compchemeng.2004.09.003
Christofides, Panagiotis D., Armaou, Antonios (2006) Control and optimization of multiscale process systems. Computers & Chemical Engineering, 30. 1670-1686 doi:10.1016/j.compchemeng.2006.05.025
Antoniades, Charalambos, Christofides, Panagiotis D. (1999) Feedback control of nonlinear differential difference equation systems. Chemical Engineering Science, 54 (23). 5677-5709 doi:10.1016/s0009-2509(99)00148-7
Armaou, Antonios, Christofides, Panagiotis D. (2001) Crystal temperature control in the Czochralski crystal growth process. AIChE Journal, 47 (1). 79-106 doi:10.1002/aic.690470111
Baker, James, Armaou, Antonios, Christofides, Panagiotis D (2000) Nonlinear Control of Incompressible Fluid Flow: Application to Burgers' Equation and 2D Channel Flow. Journal of Mathematical Analysis and Applications, 252. 230-255 doi:10.1006/jmaa.2000.6994
Christofides, Panagiotis D., Daoutidis, Prodromos (1998) Robust control of hyperbolic PDE systems. Chemical Engineering Science, 53 (1). 85-105 doi:10.1016/s0009-2509(97)87571-9
 
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