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Wittmaack, K. (1985) Experimental verification of some predictions of a simple model of ion implantation in the presence of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 779-783 doi:10.1016/0168-583x(85)90468-9

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Reference TypeJournal (article/letter/editorial)
TitleExperimental verification of some predictions of a simple model of ion implantation in the presence of sputtering
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsWittmaack, K.Author
Year1985 (March)Volume7
PublisherElsevier BV
DOIdoi:10.1016/0168-583x(85)90468-9Search in ResearchGate
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Mindat Ref. ID5583775Long-form Identifiermindat:1:5:5583775:4
GUID0
Full ReferenceWittmaack, K. (1985) Experimental verification of some predictions of a simple model of ion implantation in the presence of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 779-783 doi:10.1016/0168-583x(85)90468-9
Plain TextWittmaack, K. (1985) Experimental verification of some predictions of a simple model of ion implantation in the presence of sputtering. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 779-783 doi:10.1016/0168-583x(85)90468-9
In(1985) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 7. Elsevier BV

See Also

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Jain, Amitabh (1985) The annealing of light ion implantation damage in silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 326-328 doi:10.1016/0168-583x(85)90574-9
Wittmaack, K. (1985) Assessment of the relative contribution of atomic mixing and selective sputtering to beam induced broadening in SIMS depth profiling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 750-754 doi:10.1016/0168-583x(85)90463-x
Sigmon, T.W. (1985) Ion implantation in II–VI compound semiconductors. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 402-408 doi:10.1016/0168-583x(85)90588-9
Ziegler, J.F. (1985) High energy ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 270-282 doi:10.1016/0168-583x(85)90645-7
Menzel, N., Wittmaack, K. (1985) Modification of stationary xenon implantation profiles in silicon by low-energy postbombardment with inert-gas ions. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 366-370 doi:10.1016/0168-583x(85)90583-x
Nishi, Hidetoshi (1985) Ion implantation for high-speed III–V ICs. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 395-401 doi:10.1016/0168-583x(85)90587-7
Matteson, S. (1985) Ion implantation in III–V materials. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 10. 510-514 doi:10.1016/0168-583x(85)90298-8
Böhringer, K., Mannsperger, H., Kalbitzer, S. (1985) Electronic transport in a-Si:H produced by ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 299-303 doi:10.1016/0168-583x(85)90569-5
Grabowski, K.S., Correll, F.D., Vozzo, F.R. (1985) Sputtering and migration during Ta implantation of Fe. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 798-802 doi:10.1016/0168-583x(85)90472-0
Wittkower, A., Hirvonen, J.K. (1985) Some practical aspects of ion implantation for wear reduction. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 6 (1). 78-87 doi:10.1016/0168-583x(85)90613-5
Hubler, O.K., Smidt, F.A. (1985) Application of ion implantation to wear protection of materials. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 151-157 doi:10.1016/0168-583x(85)90547-6
 
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