Yamashita, Y., Yoshikawa, H., Chikyo, T., Kobayashi, K. (2014) Direct observation of bias-dependence potential distribution in metal/HfO2 gate stack structures by hard x-ray photoelectron spectroscopy under device operation. Journal of Applied Physics, 115 (4). 43721pp. doi:10.1063/1.4863637
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Direct observation of bias-dependence potential distribution in metal/HfO2 gate stack structures by hard x-ray photoelectron spectroscopy under device operation | ||
| Journal | Journal of Applied Physics | ||
| Authors | Yamashita, Y. | Author | |
| Yoshikawa, H. | Author | ||
| Chikyo, T. | Author | ||
| Kobayashi, K. | Author | ||
| Year | 2014 (January 28) | Volume | 115 |
| Issue | 4 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.4863637Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5198232 | Long-form Identifier | mindat:1:5:5198232:0 |
| GUID | 0 | ||
| Full Reference | Yamashita, Y., Yoshikawa, H., Chikyo, T., Kobayashi, K. (2014) Direct observation of bias-dependence potential distribution in metal/HfO2 gate stack structures by hard x-ray photoelectron spectroscopy under device operation. Journal of Applied Physics, 115 (4). 43721pp. doi:10.1063/1.4863637 | ||
| Plain Text | Yamashita, Y., Yoshikawa, H., Chikyo, T., Kobayashi, K. (2014) Direct observation of bias-dependence potential distribution in metal/HfO2 gate stack structures by hard x-ray photoelectron spectroscopy under device operation. Journal of Applied Physics, 115 (4). 43721pp. doi:10.1063/1.4863637 | ||
| In | (2014, January) Journal of Applied Physics Vol. 115 (4) AIP Publishing | ||
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