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Nagahori, Atsushi, Raj, Rishi (1995) Electron Cyclotron Resonance Plasma-Enhanced Metalorganic Chemical Vapor Deposition of Tantalum Oxide Thin Films on Silicon near Room Temperature. Journal of the American Ceramic Society, 78 (6). 1585-1592 doi:10.1111/j.1151-2916.1995.tb08855.x

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Reference TypeJournal (article/letter/editorial)
TitleElectron Cyclotron Resonance Plasma-Enhanced Metalorganic Chemical Vapor Deposition of Tantalum Oxide Thin Films on Silicon near Room Temperature
JournalJournal of the American Ceramic Society
AuthorsNagahori, AtsushiAuthor
Raj, RishiAuthor
Year1995 (June)Volume78
Issue6
PublisherWiley
DOIdoi:10.1111/j.1151-2916.1995.tb08855.xSearch in ResearchGate
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Mindat Ref. ID4092415Long-form Identifiermindat:1:5:4092415:3
GUID0
Full ReferenceNagahori, Atsushi, Raj, Rishi (1995) Electron Cyclotron Resonance Plasma-Enhanced Metalorganic Chemical Vapor Deposition of Tantalum Oxide Thin Films on Silicon near Room Temperature. Journal of the American Ceramic Society, 78 (6). 1585-1592 doi:10.1111/j.1151-2916.1995.tb08855.x
Plain TextNagahori, Atsushi, Raj, Rishi (1995) Electron Cyclotron Resonance Plasma-Enhanced Metalorganic Chemical Vapor Deposition of Tantalum Oxide Thin Films on Silicon near Room Temperature. Journal of the American Ceramic Society, 78 (6). 1585-1592 doi:10.1111/j.1151-2916.1995.tb08855.x
In(1995, June) Journal of the American Ceramic Society Vol. 78 (6) Wiley

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Versteeg, Vera A., Avedisian, C. Thomas, Raj, Rishi (1995) Metalorganic Chemical Vapor Deposition by Pulsed Liquid Injection Using an Ultrasonic Nozzle: Titanium Dioxide on Sapphire from Titanium(IV) Isopropoxide. Journal of the American Ceramic Society, 78 (10). 2763-2768 doi:10.1111/j.1151-2916.1995.tb08052.x
Gopalan, Venkatraman, Raj, Rishi (1995) Structure-Optical Property Correlation of Epitaxial Potassium Niobate Thin Films Deposited on Magnesium Oxide (100) Substrates Using a Strontium Titanate Transition Layer. Journal of the American Ceramic Society, 78 (7). 1825-1833 doi:10.1111/j.1151-2916.1995.tb08895.x
Zhu, Shen, Shahedipour, Fatemeh, White, Henry W. (2005) Low-Temperature Synthesis of Diamond-like Carbon Films on Steel Substrates by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapor Deposition. Journal of the American Ceramic Society, 81 (4). 1041-1044 doi:10.1111/j.1151-2916.1998.tb02445.x
Chen, Zhong-Xin, Eyden, Joost, Koot, Wouter, Berg, Rob, Mechelen, Jan van, Derking, Anke (1995) Preparation of Zinc Titanate Thin Films by Low-Pressure Metalorganic Chemical Vapor Deposition. Journal of the American Ceramic Society, 78 (11). 2993-3001 doi:10.1111/j.1151-2916.1995.tb09075.x
Krumdieck, Susan, Raj, Rishi (2004) Conversion Efficiency of Alkoxide Precursor to Oxide Films Grown by an Ultrasonic-Assisted, Pulsed Liquid Injection, Metalorganic Chemical Vapor Deposition (Pulsed-CVD) Process. Journal of the American Ceramic Society, 82 (6). 1605-1607 doi:10.1111/j.1151-2916.1999.tb01968.x
Wang, Hongyu, Singh, Raj N., Goela, Jitendra S. (1995) Effects of Postdeposition Treatments on the Mechanical Properties of a Chemical-Vapor-Deposited Silicon Carbide. Journal of the American Ceramic Society, 78 (9). 2437-2442 doi:10.1111/j.1151-2916.1995.tb08682.x
Hwang, Cheol Seong, Kim, Hyeong Joon (1995) Pb-Diffusion Barrier Layers for PbTiO3 Thin Films Deposited on Si Substrates by Metal Organic Chemical Vapor Deposition. Journal of the American Ceramic Society, 78 (2). 337-341 doi:10.1111/j.1151-2916.1995.tb08805.x
Hwang, Cheol Seong, Kim, Hyeong Joon (1995) Deposition of Pb(Zr,Ti)O3 Thin Films by Metal-Organic Chemical Vapor Deposition Using β-diketonate Precursors at Low Temperatures. Journal of the American Ceramic Society, 78 (2). 329-336 doi:10.1111/j.1151-2916.1995.tb08804.x
Zhang, Zhiwu, Raj, Rishi (1995) Influence of Grain Size on Ferroelastic Toughening and Piezoelectric Behavior of Lead Zirconate Titanate. Journal of the American Ceramic Society, 78 (12). 3363-3368 doi:10.1111/j.1151-2916.1995.tb07978.x
Lackey, W. Jack, Hanigofsky, John A., Freeman, Garth B., Hardin, Regina D., Prasad, Ajit (1995) Continuous Fabrication of Silicon Carbide Fiber Tows by Chemical Vapor Deposition. Journal of the American Ceramic Society, 78 (6). 1564-1570 doi:10.1111/j.1151-2916.1995.tb08852.x
Chen, San-Yuan, Chen, I-Wei (1995) Cracking during Pyrolysis of Oxide Thin Films-Phenomenology, Mechanisms, and Mechanics. Journal of the American Ceramic Society, 78 (11). 2929-2939 doi:10.1111/j.1151-2916.1995.tb09066.x
 
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