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Kim, Young Suk, Yang, Seong Ho, Kim, Chan Il, Lee, Seoung Soo (2003) Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components. Materials Science Forum, 426. 2243-2248 doi:10.4028/www.scientific.net/msf.426-432.2243

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Reference TypeJournal (article/letter/editorial)
TitleMolecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components
JournalMaterials Science Forum
AuthorsKim, Young SukAuthor
Yang, Seong HoAuthor
Kim, Chan IlAuthor
Lee, Seoung SooAuthor
Year2003 (August)Volume426
PublisherTrans Tech Publications, Ltd.
DOIdoi:10.4028/www.scientific.net/msf.426-432.2243Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID9853669Long-form Identifiermindat:1:5:9853669:4
GUID0
Full ReferenceKim, Young Suk, Yang, Seong Ho, Kim, Chan Il, Lee, Seoung Soo (2003) Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components. Materials Science Forum, 426. 2243-2248 doi:10.4028/www.scientific.net/msf.426-432.2243
Plain TextKim, Young Suk, Yang, Seong Ho, Kim, Chan Il, Lee, Seoung Soo (2003) Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components. Materials Science Forum, 426. 2243-2248 doi:10.4028/www.scientific.net/msf.426-432.2243
In(2003) Materials Science Forum Vol. 426. Trans Tech Publications, Ltd.

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