Brodskii, V.V., Rykova, E.A., Bagatur'yants, A.A., Korkin, A.A. (2002) Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures. Computational Materials Science, 24 (1). 278-283 doi:10.1016/s0927-0256(02)00192-1
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures | ||
| Journal | Computational Materials Science | ||
| Authors | Brodskii, V.V. | Author | |
| Rykova, E.A. | Author | ||
| Bagatur'yants, A.A. | Author | ||
| Korkin, A.A. | Author | ||
| Year | 2002 (May) | Volume | 24 |
| Issue | 1 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/s0927-0256(02)00192-1Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 9503534 | Long-form Identifier | mindat:1:5:9503534:3 |
| GUID | 0 | ||
| Full Reference | Brodskii, V.V., Rykova, E.A., Bagatur'yants, A.A., Korkin, A.A. (2002) Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures. Computational Materials Science, 24 (1). 278-283 doi:10.1016/s0927-0256(02)00192-1 | ||
| Plain Text | Brodskii, V.V., Rykova, E.A., Bagatur'yants, A.A., Korkin, A.A. (2002) Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(100) surface: initial reactions and surface structures. Computational Materials Science, 24 (1). 278-283 doi:10.1016/s0927-0256(02)00192-1 | ||
| In | (2002, May) Computational Materials Science Vol. 24 (1) Elsevier BV | ||
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