Rampelberg, Geert, Devloo-Casier, Kilian, Deduytsche, Davy, Schaekers, Marc, Blasco, Nicolas, Detavernier, Christophe (2013) Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers. Applied Physics Letters, 102 (11). 111910pp. doi:10.1063/1.4798337

See Also

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	Rampelberg, Geert, Schaekers, Marc, Martens, Koen, Xie, Qi, Deduytsche, Davy, De Schutter, Bob, Blasco, Nicolas, Kittl, Jorge, Detavernier, Christophe (2011) Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition. Applied Physics Letters, 98 (16). 162902pp. doi:10.1063/1.3579195
	Roy, Amit K., Dendooven, Jolien, Deduytsche, Davy, Devloo-Casier, Kilian, Ragaert, Kim, Cardon, Ludwig, Detavernier, Christophe (2015) Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene. Chemical Communications, 51 (17). 3556-3558 doi:10.1039/c4cc09474c
	Dendooven, Jolien, Ramachandran, Ranjith K., Devloo-Casier, Kilian, Rampelberg, Geert, Filez, Matthias, Poelman, Hilde, Marin, Guy B., Fonda, Emiliano, Detavernier, Christophe (2013) Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone. The Journal of Physical Chemistry C, 117 (40). 20557-20561 doi:10.1021/jp403455a
	Hu, Chen, Gassenq, Alban, Justo, Yolanda, Devloo-Casier, Kilian, Chen, Hongtao, Detavernier, Christophe, Hens, Zeger, Roelkens, Günther (2014) Air-stable short-wave infrared PbS colloidal quantum dot photoconductors passivated with Al2O3 atomic layer deposition. Applied Physics Letters, 105 (17). 171110pp. doi:10.1063/1.4900930
	Levrau, Elisabeth, Devloo-Casier, Kilian, Dendooven, Jolien, Ludwig, Karl F., Verdonck, Patrick, Meersschaut, Johan, Baklanov, Mikhail. R., Detavernier, Christophe (2013) Atomic Layer Deposition of TiO2 on Surface Modified Nanoporous Low-k Films. Langmuir, 29. 12284-12289 doi:10.1021/la4027738
	Xie, Qi, Deduytsche, Davy, Schaekers, Marc, Caymax, Matty, Delabie, Annelies, Qu, Xin-Ping, Detavernier, Christophe (2010) Implementing TiO2 as gate dielectric for Ge-channel complementary metal-oxide-semiconductor devices by using HfO2/GeO2 interlayer. Applied Physics Letters, 97 (11). 112905pp. doi:10.1063/1.3490710
	Mattelaer, Felix, Geryl, Kobe, Rampelberg, Geert, Dobbelaere, Thomas, Dendooven, Jolien, Detavernier, Christophe (2016) Atomic layer deposition of vanadium oxides for thin-film lithium-ion battery applications. RSC Advances, 6 (115). 114658-114665 doi:10.1039/c6ra25742a
	Dendooven, Jolien, Devloo-Casier, Kilian, Levrau, Elisabeth, Van Hove, Robbert, Pulinthanathu Sree, Sreeprasanth, Baklanov, Mikhail R., Martens, Johan A., Detavernier, Christophe (2012) In SituMonitoring of Atomic Layer Deposition in Nanoporous Thin Films Using Ellipsometric Porosimetry. Langmuir, 28. 3852-3859 doi:10.1021/la300045z
	Zhao, Bo, Mattelaer, Felix, Rampelberg, Geert, Dendooven, Jolien, Detavernier, Christophe (2020) Thermal and Plasma-Enhanced Atomic Layer Deposition of Yttrium Oxide Films and the Properties of Water Wettability. ACS Applied Materials & Interfaces, 12. 3179-3187 doi:10.1021/acsami.9b18412
	Deng, Shaoren, Xie, Qi, Deduytsche, Davy, Schaekers, Marc, Lin, Dennis, Caymax, Matty, Delabie, Annelies, Van den Berghe, Sven, Qu, Xinping, Detavernier, Christophe (2011) Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices. Applied Physics Letters, 99 (5). 52906pp. doi:10.1063/1.3622649
	Longrie, Delphine, Deduytsche, Davy, Haemers, Jo, Smet, Philippe F., Driesen, Kris, Detavernier, Christophe (2014) Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor. ACS Applied Materials & Interfaces, 6. 7316-7324 doi:10.1021/am5007222