Hwu, E.-T., Hung, S.-K., Yang, C.-W., Hwang, I.-S., Huang, K.-Y. (2007) Simultaneous detection of translational and angular displacements of micromachined elements. Applied Physics Letters, 91 (22). 221908pp. doi:10.1063/1.2817750

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Reference Type	Journal (article/letter/editorial)
Title	Simultaneous detection of translational and angular displacements of micromachined elements
Journal	Applied Physics Letters
Authors	Hwu, E.-T.		Author
	Hung, S.-K.		Author
	Yang, C.-W.		Author
	Hwang, I.-S.		Author
	Huang, K.-Y.		Author
Year	2007 (November 26)	Volume	91
Issue	22
Publisher	AIP Publishing
DOI	doi:10.1063/1.2817750Search in ResearchGate
	Generate Citation Formats
Mindat Ref. ID	8558050	Long-form Identifier	mindat:1:5:8558050:7
GUID	0
Full Reference	Hwu, E.-T., Hung, S.-K., Yang, C.-W., Hwang, I.-S., Huang, K.-Y. (2007) Simultaneous detection of translational and angular displacements of micromachined elements. Applied Physics Letters, 91 (22). 221908pp. doi:10.1063/1.2817750
Plain Text	Hwu, E.-T., Hung, S.-K., Yang, C.-W., Hwang, I.-S., Huang, K.-Y. (2007) Simultaneous detection of translational and angular displacements of micromachined elements. Applied Physics Letters, 91 (22). 221908pp. doi:10.1063/1.2817750
In	(2007, November) Applied Physics Letters Vol. 91 (22) AIP Publishing

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Hwu, E.-T., Hung, S.-K., Yang, C.-W., Hwang, I.-S., Huang, K.-Y. (2007) Simultaneous detection of translational and angular displacements of micromachined elements. Applied Physics Letters, 91 (22). 221908pp. doi:10.1063/1.2817750

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