Majumder, Prodyut, Takoudis, Christos G. (2007) Investigation on the diffusion barrier properties of sputtered Mo∕W–N thin films in Cu interconnects. Applied Physics Letters, 91 (16). 162108pp. doi:10.1063/1.2800382
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Investigation on the diffusion barrier properties of sputtered Mo∕W–N thin films in Cu interconnects | ||
| Journal | Applied Physics Letters | ||
| Authors | Majumder, Prodyut | Author | |
| Takoudis, Christos G. | Author | ||
| Year | 2007 (October 15) | Volume | 91 |
| Issue | 16 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.2800382Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8556572 | Long-form Identifier | mindat:1:5:8556572:0 |
| GUID | 0 | ||
| Full Reference | Majumder, Prodyut, Takoudis, Christos G. (2007) Investigation on the diffusion barrier properties of sputtered Mo∕W–N thin films in Cu interconnects. Applied Physics Letters, 91 (16). 162108pp. doi:10.1063/1.2800382 | ||
| Plain Text | Majumder, Prodyut, Takoudis, Christos G. (2007) Investigation on the diffusion barrier properties of sputtered Mo∕W–N thin films in Cu interconnects. Applied Physics Letters, 91 (16). 162108pp. doi:10.1063/1.2800382 | ||
| In | (2007, October) Applied Physics Letters Vol. 91 (16) AIP Publishing | ||
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