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Wang, Chengqing, Jones, Ronald L., Lin, Eric K., Wu, Wen-Li, Leu, Jim (2007) Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves. Applied Physics Letters, 90 (19). 193122pp. doi:10.1063/1.2737399

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Reference TypeJournal (article/letter/editorial)
TitleSmall angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves
JournalApplied Physics Letters
AuthorsWang, ChengqingAuthor
Jones, Ronald L.Author
Lin, Eric K.Author
Wu, Wen-LiAuthor
Leu, JimAuthor
Year2007 (May 7)Volume90
Issue19
PublisherAIP Publishing
DOIdoi:10.1063/1.2737399Search in ResearchGate
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Mindat Ref. ID8553947Long-form Identifiermindat:1:5:8553947:9
GUID0
Full ReferenceWang, Chengqing, Jones, Ronald L., Lin, Eric K., Wu, Wen-Li, Leu, Jim (2007) Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves. Applied Physics Letters, 90 (19). 193122pp. doi:10.1063/1.2737399
Plain TextWang, Chengqing, Jones, Ronald L., Lin, Eric K., Wu, Wen-Li, Leu, Jim (2007) Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves. Applied Physics Letters, 90 (19). 193122pp. doi:10.1063/1.2737399
In(2007, May) Applied Physics Letters Vol. 90 (19) AIP Publishing

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