Lai, Chao Sung, Fan, Kung Ming, Peng, Hsing Kan, Lin, Shian Jyh, Lee, Chung Yuan, Ai, Chi Fong (2007) Fluorine effects on the dipole structures of the Al2O3 thin films and characterization by spectroscopic ellipsometry. Applied Physics Letters, 90 (17). 172904pp. doi:10.1063/1.2730581
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Fluorine effects on the dipole structures of the Al2O3 thin films and characterization by spectroscopic ellipsometry | ||
| Journal | Applied Physics Letters | ||
| Authors | Lai, Chao Sung | Author | |
| Fan, Kung Ming | Author | ||
| Peng, Hsing Kan | Author | ||
| Lin, Shian Jyh | Author | ||
| Lee, Chung Yuan | Author | ||
| Ai, Chi Fong | Author | ||
| Year | 2007 (April 23) | Volume | 90 |
| Issue | 17 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.2730581Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8553607 | Long-form Identifier | mindat:1:5:8553607:4 |
| GUID | 0 | ||
| Full Reference | Lai, Chao Sung, Fan, Kung Ming, Peng, Hsing Kan, Lin, Shian Jyh, Lee, Chung Yuan, Ai, Chi Fong (2007) Fluorine effects on the dipole structures of the Al2O3 thin films and characterization by spectroscopic ellipsometry. Applied Physics Letters, 90 (17). 172904pp. doi:10.1063/1.2730581 | ||
| Plain Text | Lai, Chao Sung, Fan, Kung Ming, Peng, Hsing Kan, Lin, Shian Jyh, Lee, Chung Yuan, Ai, Chi Fong (2007) Fluorine effects on the dipole structures of the Al2O3 thin films and characterization by spectroscopic ellipsometry. Applied Physics Letters, 90 (17). 172904pp. doi:10.1063/1.2730581 | ||
| In | (2007, April) Applied Physics Letters Vol. 90 (17) AIP Publishing | ||
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