Otani, Yohei, Itayama, Yasuhiro, Tanaka, Takuo, Fukuda, Yukio, Toyota, Hiroshi, Ono, Toshiro, Mitsui, Minoru, Nakagawa, Kiyokazu (2007) Fabrication of Ta2O5∕GeNx gate insulator stack for Ge metal-insulator-semiconductor structures by electron-cyclotron-resonance plasma nitridation and sputtering deposition techniques. Applied Physics Letters, 90 (14). 142114pp. doi:10.1063/1.2720345
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Fabrication of Ta2O5∕GeNx gate insulator stack for Ge metal-insulator-semiconductor structures by electron-cyclotron-resonance plasma nitridation and sputtering deposition techniques | ||
| Journal | Applied Physics Letters | ||
| Authors | Otani, Yohei | Author | |
| Itayama, Yasuhiro | Author | ||
| Tanaka, Takuo | Author | ||
| Fukuda, Yukio | Author | ||
| Toyota, Hiroshi | Author | ||
| Ono, Toshiro | Author | ||
| Mitsui, Minoru | Author | ||
| Nakagawa, Kiyokazu | Author | ||
| Year | 2007 (April 2) | Volume | 90 |
| Issue | 14 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.2720345Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 8553294 | Long-form Identifier | mindat:1:5:8553294:4 |
| GUID | 0 | ||
| Full Reference | Otani, Yohei, Itayama, Yasuhiro, Tanaka, Takuo, Fukuda, Yukio, Toyota, Hiroshi, Ono, Toshiro, Mitsui, Minoru, Nakagawa, Kiyokazu (2007) Fabrication of Ta2O5∕GeNx gate insulator stack for Ge metal-insulator-semiconductor structures by electron-cyclotron-resonance plasma nitridation and sputtering deposition techniques. Applied Physics Letters, 90 (14). 142114pp. doi:10.1063/1.2720345 | ||
| Plain Text | Otani, Yohei, Itayama, Yasuhiro, Tanaka, Takuo, Fukuda, Yukio, Toyota, Hiroshi, Ono, Toshiro, Mitsui, Minoru, Nakagawa, Kiyokazu (2007) Fabrication of Ta2O5∕GeNx gate insulator stack for Ge metal-insulator-semiconductor structures by electron-cyclotron-resonance plasma nitridation and sputtering deposition techniques. Applied Physics Letters, 90 (14). 142114pp. doi:10.1063/1.2720345 | ||
| In | (2007, April) Applied Physics Letters Vol. 90 (14) AIP Publishing | ||
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