| Reference Type | Journal (article/letter/editorial) |
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| Title | Seed step-coverage enhancement process for a high-aspect-ratio through-silicon via using a pyrophosphate solution |
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| Journal | Metals and Materials International |
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| Authors | Jin, SangHoon | Author |
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| Lee, DongRyul | Author |
| Lee, Woon Young | Author |
| Lee, SangYul | Author |
| Lee, Min Hyung | Author |
| Year | 2015 (July) | Volume | 21 |
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| Publisher | Springer Science and Business Media LLC |
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| DOI | doi:10.1007/s12540-015-4546-zSearch in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 8029844 | Long-form Identifier | mindat:1:5:8029844:3 |
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| GUID | 0 |
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| Full Reference | Jin, SangHoon, Lee, DongRyul, Lee, Woon Young, Lee, SangYul, Lee, Min Hyung (2015) Seed step-coverage enhancement process for a high-aspect-ratio through-silicon via using a pyrophosphate solution. Metals and Materials International, 21. 775-779 doi:10.1007/s12540-015-4546-z |
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| Plain Text | Jin, SangHoon, Lee, DongRyul, Lee, Woon Young, Lee, SangYul, Lee, Min Hyung (2015) Seed step-coverage enhancement process for a high-aspect-ratio through-silicon via using a pyrophosphate solution. Metals and Materials International, 21. 775-779 doi:10.1007/s12540-015-4546-z |
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| In | (n.d.) Metals and Materials International Vol. 21. Springer Science and Business Media LLC |
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