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Kang, Jonghyuk, Park, Ganyoung, Lee, Jaekoo (2007) Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor. Computer Physics Communications, 177. 129-130 doi:10.1016/j.cpc.2007.02.011

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Reference TypeJournal (article/letter/editorial)
TitleParticle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor
JournalComputer Physics Communications
AuthorsKang, JonghyukAuthor
Park, GanyoungAuthor
Lee, JaekooAuthor
Year2007 (July)Volume177
PublisherElsevier BV
DOIdoi:10.1016/j.cpc.2007.02.011Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID6598720Long-form Identifiermindat:1:5:6598720:7
GUID0
Full ReferenceKang, Jonghyuk, Park, Ganyoung, Lee, Jaekoo (2007) Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor. Computer Physics Communications, 177. 129-130 doi:10.1016/j.cpc.2007.02.011
Plain TextKang, Jonghyuk, Park, Ganyoung, Lee, Jaekoo (2007) Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor. Computer Physics Communications, 177. 129-130 doi:10.1016/j.cpc.2007.02.011
In(n.d.) Computer Physics Communications Vol. 177. Elsevier BV

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