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Park, Yong Seob, Hong, Byungyou (2008) Characteristics of sputtered amorphous carbon films prepared by a closed-field unbalanced magnetron sputtering method. Journal of Non-Crystalline Solids, 354 (52) 5504-5508 doi:10.1016/j.jnoncrysol.2008.08.007

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Reference TypeJournal (article/letter/editorial)
TitleCharacteristics of sputtered amorphous carbon films prepared by a closed-field unbalanced magnetron sputtering method
JournalJournal of Non-Crystalline Solids
AuthorsPark, Yong SeobAuthor
Hong, ByungyouAuthor
Year2008 (December)Volume354
Issue52
PublisherElsevier BV
DOIdoi:10.1016/j.jnoncrysol.2008.08.007Search in ResearchGate
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Mindat Ref. ID646545Long-form Identifiermindat:1:5:646545:6
GUID0
Full ReferencePark, Yong Seob, Hong, Byungyou (2008) Characteristics of sputtered amorphous carbon films prepared by a closed-field unbalanced magnetron sputtering method. Journal of Non-Crystalline Solids, 354 (52) 5504-5508 doi:10.1016/j.jnoncrysol.2008.08.007
Plain TextPark, Yong Seob, Hong, Byungyou (2008) Characteristics of sputtered amorphous carbon films prepared by a closed-field unbalanced magnetron sputtering method. Journal of Non-Crystalline Solids, 354 (52) 5504-5508 doi:10.1016/j.jnoncrysol.2008.08.007
In(2008, December) Journal of Non-Crystalline Solids Vol. 354 (52) Elsevier BV

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Park, Yong Seob, Hong, Byungyou (2008) The effect of thermal annealing on the structural and mechanical properties of a-C:H thin films prepared by the CFUBM magnetron sputtering method. Journal of Non-Crystalline Solids, 354 (33) 3980-3983 doi:10.1016/j.jnoncrysol.2008.05.043
Park, Yong Seob, Cho, Hyung Jun, Hong, Byungyou (2007) Characteristics of Conductive Amorphous Carbon (a-C) Films Prepared by Using the Magnetron Sputtering Method. Journal of the Korean Physical Society, 51 (3). 1119pp. doi:10.3938/jkps.51.1119
Park, Yong Seob (2011) Characteristics of sputtered zinc-oxide films prepared by UBM sputtering for thin film transistors. Journal of Non-Crystalline Solids, 357 (3) 1096-1100 doi:10.1016/j.jnoncrysol.2010.11.035
Khoshman, J.M., Ingram, D.C., Kordesch, M.E. (2008) Growth and optical properties of amorphous Be0.13Zn0.38O0.49 thin films prepared by radio frequency magnetron sputtering. Journal of Non-Crystalline Solids, 354 (19) 2783-2786 doi:10.1016/j.jnoncrysol.2007.09.061
Cho, Yun Hye, Choi, Won Seok, Park, Yong Seob, Cho, Hyung Jun, Hong, Byungyou (2007) Study of the Tribological Properties of DLC Double-Layer Films Grown by Using Plasma enhanced Chemical-Vapor Deposition and Closed-Field Unbalanced Magnetron Sputtering. Journal of the Korean Physical Society, 51 (3). 1129pp. doi:10.3938/jkps.51.1129
Park, Yong Seob, Hong, Byungyou (2009) Structural and tribological properties of nitrogen doped amorphous carbon thin films synthesized by CFUBM sputtering method for protective coatings. Applied Surface Science, 255. 3913-3917 doi:10.1016/j.apsusc.2008.07.190
Lee, Jaehyeong, Hwang, Sung Hwan, Hwang, Soohyun, Park, Yong Seob (2017) Characteristics of W-Doped Nanocrystalline Carbon Films Prepared by Pulsed DC Unbalanced Magnetron Sputtering. Science of Advanced Materials, 9. 984-987 doi:10.1166/sam.2017.2924
Dai, Haiyang, Chen, Jing, Xue, Renzhong, Li, Tao, Chen, Zhenping (2013) Analysis of hydrogenated amorphous carbon films deposited by middle frequency pulsed unbalanced magnetron sputtering. Journal of Non-Crystalline Solids, 363. 77-83 doi:10.1016/j.jnoncrysol.2012.12.012
Lee, Jaehyeong, Park, Yong Seob (2015) Characteristics of Al Doped ZnO Films Prepared on Polyethylene Terephthalate Substrate by Unbalanced Magnetron Sputtering Method for Organic Thin Film Transistors. Science of Advanced Materials, 7. 151-156 doi:10.1166/sam.2015.2095
Park, Yong Seob, Kim, Nam-Hoon (2019) TiC/a-C Nano-Composite Films Fabricated by Using Closed-Field Unbalanced Magnetron Sputtering for Biomedical Applications. Journal of the Korean Physical Society, 75 (5). 380-384 doi:10.3938/jkps.75.380
Myung, H (2004) Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering. Materials Letters, 58. 1513-1516 doi:10.1016/j.matlet.2003.10.021
 
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