Lee, J.-W., Tomozawa, M. (2007) Water diffusion in silica film during silicon wet oxidation. Journal of Non-Crystalline Solids, 353 (52) 4633-4639 doi:10.1016/j.jnoncrysol.2007.07.016
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Water diffusion in silica film during silicon wet oxidation | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Lee, J.-W. | Author | |
| Tomozawa, M. | Author | ||
| Year | 2007 (December) | Volume | 353 |
| Issue | 52 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.jnoncrysol.2007.07.016Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 645384 | Long-form Identifier | mindat:1:5:645384:2 |
| GUID | 0 | ||
| Full Reference | Lee, J.-W., Tomozawa, M. (2007) Water diffusion in silica film during silicon wet oxidation. Journal of Non-Crystalline Solids, 353 (52) 4633-4639 doi:10.1016/j.jnoncrysol.2007.07.016 | ||
| Plain Text | Lee, J.-W., Tomozawa, M. (2007) Water diffusion in silica film during silicon wet oxidation. Journal of Non-Crystalline Solids, 353 (52) 4633-4639 doi:10.1016/j.jnoncrysol.2007.07.016 | ||
| In | (2007, December) Journal of Non-Crystalline Solids Vol. 353 (52) Elsevier BV | ||
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