Rusop, M., Omer, A.M.M., Adhikary, S., Soga, T., Jimbo, T., Umeno, M. (2005) Effect of methane gas on the properties of nitrogenated amorphous carbon films grown by surface wave microwave plasma CVD. Journal of Non-Crystalline Solids, 351 (30) 2562-2567 doi:10.1016/j.jnoncrysol.2005.06.045
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Effect of methane gas on the properties of nitrogenated amorphous carbon films grown by surface wave microwave plasma CVD | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Rusop, M. | Author | |
| Omer, A.M.M. | Author | ||
| Adhikary, S. | Author | ||
| Soga, T. | Author | ||
| Jimbo, T. | Author | ||
| Umeno, M. | Author | ||
| Year | 2005 (September) | Volume | 351 |
| Issue | 30 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.jnoncrysol.2005.06.045Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 643135 | Long-form Identifier | mindat:1:5:643135:2 |
| GUID | 0 | ||
| Full Reference | Rusop, M., Omer, A.M.M., Adhikary, S., Soga, T., Jimbo, T., Umeno, M. (2005) Effect of methane gas on the properties of nitrogenated amorphous carbon films grown by surface wave microwave plasma CVD. Journal of Non-Crystalline Solids, 351 (30) 2562-2567 doi:10.1016/j.jnoncrysol.2005.06.045 | ||
| Plain Text | Rusop, M., Omer, A.M.M., Adhikary, S., Soga, T., Jimbo, T., Umeno, M. (2005) Effect of methane gas on the properties of nitrogenated amorphous carbon films grown by surface wave microwave plasma CVD. Journal of Non-Crystalline Solids, 351 (30) 2562-2567 doi:10.1016/j.jnoncrysol.2005.06.045 | ||
| In | (2005, September) Journal of Non-Crystalline Solids Vol. 351 (30) Elsevier BV | ||
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