| Reference Type | Journal (article/letter/editorial) |
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| Title | Influence of different carbon source gases on preparation and properties of a-Si1−XCX:H alloy films including μc-Si:H by hot-wire CVD |
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| Journal | Journal of Non-Crystalline Solids |
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| Authors | Itoh, T | Author |
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| Fujiwara, T | Author |
| Katoh, Y | Author |
| Fukunaga, K | Author |
| Nonomura, S | Author |
| Year | 2002 (April) | Volume | 299 |
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| Publisher | Elsevier BV |
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| DOI | doi:10.1016/s0022-3093(01)01115-2Search in ResearchGate |
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| Generate Citation Formats |
| Mindat Ref. ID | 640278 | Long-form Identifier | mindat:1:5:640278:9 |
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| GUID | 0 |
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| Full Reference | Itoh, T, Fujiwara, T, Katoh, Y, Fukunaga, K, Nonomura, S (2002) Influence of different carbon source gases on preparation and properties of a-Si1−XCX:H alloy films including μc-Si:H by hot-wire CVD. Journal of Non-Crystalline Solids, 299. 880-884 doi:10.1016/s0022-3093(01)01115-2 |
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| Plain Text | Itoh, T, Fujiwara, T, Katoh, Y, Fukunaga, K, Nonomura, S (2002) Influence of different carbon source gases on preparation and properties of a-Si1−XCX:H alloy films including μc-Si:H by hot-wire CVD. Journal of Non-Crystalline Solids, 299. 880-884 doi:10.1016/s0022-3093(01)01115-2 |
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| In | (2002) Journal of Non-Crystalline Solids Vol. 299. Elsevier BV |
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