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Reinig, Peter, Fenske, Frank, Fuhs, Walther, Selle, Burkhardt (2002) Crystalline silicon films grown by pulsed dc magnetron sputtering. Journal of Non-Crystalline Solids, 299. 128-132 doi:10.1016/s0022-3093(01)00997-8

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Reference TypeJournal (article/letter/editorial)
TitleCrystalline silicon films grown by pulsed dc magnetron sputtering
JournalJournal of Non-Crystalline Solids
AuthorsReinig, PeterAuthor
Fenske, FrankAuthor
Fuhs, WaltherAuthor
Selle, BurkhardtAuthor
Year2002 (April)Volume299
PublisherElsevier BV
DOIdoi:10.1016/s0022-3093(01)00997-8Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID640174Long-form Identifiermindat:1:5:640174:4
GUID0
Full ReferenceReinig, Peter, Fenske, Frank, Fuhs, Walther, Selle, Burkhardt (2002) Crystalline silicon films grown by pulsed dc magnetron sputtering. Journal of Non-Crystalline Solids, 299. 128-132 doi:10.1016/s0022-3093(01)00997-8
Plain TextReinig, Peter, Fenske, Frank, Fuhs, Walther, Selle, Burkhardt (2002) Crystalline silicon films grown by pulsed dc magnetron sputtering. Journal of Non-Crystalline Solids, 299. 128-132 doi:10.1016/s0022-3093(01)00997-8
In(2002) Journal of Non-Crystalline Solids Vol. 299. Elsevier BV

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Reinig, P., Fenske, F., Selle, B., Bohne, W., Röhrich, J., Sieber, I., Fuhs, W. (2004) Low-temperature silicon homoepitaxial growth by pulsed magnetron sputtering. Applied Surface Science, 227. 114-121 doi:10.1016/j.apsusc.2003.11.060
Froitzheim, A, Brendel, K, Elstner, L, Fuhs, W, Kliefoth, K, Schmidt, M (2002) Interface recombination in heterojunctions of amorphous and crystalline silicon. Journal of Non-Crystalline Solids, 299. 663-667 doi:10.1016/s0022-3093(01)01029-8
Brendel, K, Nickel, N.H, Lips, K, Fuhs, W (2002) Photoluminescence in laser-crystallized polycrystalline silicon. Journal of Non-Crystalline Solids, 299. 658-662 doi:10.1016/s0022-3093(01)00973-5
Saleh, R, Munisa, L, Beyer, W (2002) Structural characterization of a-Si:C:H alloys prepared by dc sputtering. Journal of Non-Crystalline Solids, 299. 891-895 doi:10.1016/s0022-3093(01)00989-9
Gall, S, Muske, M, Sieber, I, Nast, O, Fuhs, W (2002) Aluminum-induced crystallization of amorphous silicon. Journal of Non-Crystalline Solids, 299. 741-745 doi:10.1016/s0022-3093(01)01108-5
Reinig, P, Fenske, F, Fuhs, W, Schöpke, A, Selle, B (2003) Crystalline silicon films sputtered on molybdenum. Applied Surface Science, 210. 301-306 doi:10.1016/s0169-4332(03)00148-x
Sameshima, T, Kaneko, Y, Andoh, N (2002) Rapid crystallization of silicon films using pulsed current-induced joule heating. Journal of Non-Crystalline Solids, 299. 746-750 doi:10.1016/s0022-3093(01)01109-7
Lips, K, Kanschat, P, Brehme, S, Fuhs, W (2002) An ESR study of bandtail states in phosphorus doped microcrystalline silicon. Journal of Non-Crystalline Solids, 299. 350-354 doi:10.1016/s0022-3093(01)01011-0
Boehme, Christoph, Lucovsky, Gerald (2002) Origins of silicon solar cell passivation by SiNx:H anneal. Journal of Non-Crystalline Solids, 299. 1157-1161 doi:10.1016/s0022-3093(01)01135-8
Sládek, Petr, St'ahel, Pavel, Št'astný, Jiřı́ (2002) Modifications of the optical parameters of silicon thin films due to light scattering. Journal of Non-Crystalline Solids, 299. 295-299 doi:10.1016/s0022-3093(01)00952-8
Ando, E., Suzuki, S. (1997) Optical and mechanical properties of Cr and CrNx films by dc magnetron sputtering. Journal of Non-Crystalline Solids, 218. 68-73 doi:10.1016/s0022-3093(97)00197-x
 
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