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Diomede, Paola, Kim, Doosik, Economou, Demetre J. (2013) Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas. AIChE Journal, 59 (9). 3214-3222 doi:10.1002/aic.14053

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Reference TypeJournal (article/letter/editorial)
TitleParticle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas
JournalAIChE Journal
AuthorsDiomede, PaolaAuthor
Kim, DoosikAuthor
Economou, Demetre J.Author
Year2013 (September)Volume59
Issue9
PublisherWiley
DOIdoi:10.1002/aic.14053Search in ResearchGate
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Mindat Ref. ID6286495Long-form Identifiermindat:1:5:6286495:0
GUID0
Full ReferenceDiomede, Paola, Kim, Doosik, Economou, Demetre J. (2013) Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas. AIChE Journal, 59 (9). 3214-3222 doi:10.1002/aic.14053
Plain TextDiomede, Paola, Kim, Doosik, Economou, Demetre J. (2013) Particle-in-cell simulation of electron and ion energy distributions in dc/rf hybrid capacitively-coupled plasmas. AIChE Journal, 59 (9). 3214-3222 doi:10.1002/aic.14053
In(2013, September) AIChE Journal Vol. 59 (9) Wiley

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Diomede, Paola, Economou, Demetre J. (2014) Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses. Journal of Applied Physics, 115 (23). 233302pp. doi:10.1063/1.4884017
Diomede, Paola, Economou, Demetre J., Donnelly, Vincent M. (2011) Particle-in-cell simulation of ion energy distributions on an electrode by applying tailored bias waveforms in the afterglow of a pulsed plasma. Journal of Applied Physics, 109 (8). 83302pp. doi:10.1063/1.3573488
Panagopoulos, Theodoros, Kim, Doosik, Midha, Vikas, Economou, Demetre J. (2002) Three-dimensional simulation of an inductively coupled plasma reactor. Journal of Applied Physics, 91 (5). 2687-2696 doi:10.1063/1.1448673
Xu, Lin, Chen, Lee, Funk, Merritt, Ranjan, Alok, Hummel, Mike, Bravenec, Ron, Sundararajan, Radha, Economou, Demetre J., Donnelly, Vincent M. (2008) Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge. Applied Physics Letters, 93 (26). 261502pp. doi:10.1063/1.3062853
Diomede, Paola, Economou, Demetre J., Donnelly, Vincent M. (2012) Rapid calculation of the ion energy distribution on a plasma electrode. Journal of Applied Physics, 111 (12). 123306pp. doi:10.1063/1.4728997
Kim, Doosik, Economou, Demetre J. (2003) Simulation of plasma molding over a ring on a flat surface. Journal of Applied Physics, 94 (6). 3740-3747 doi:10.1063/1.1602573
Kim, Doosik, Economou, Demetre J. (2004) Simulation of a two-dimensional sheath over a flat insulator–conductor interface on a radio-frequency biased electrode in a high-density plasma. Journal of Applied Physics, 95 (7). 3311-3318 doi:10.1063/1.1652249
Kim, Doosik, Economou, Demetre J. (2003) Simulation of a two-dimensional sheath over a flat wall with an insulator/conductor interface exposed to a high density plasma. Journal of Applied Physics, 94 (5). 2852-2857 doi:10.1063/1.1597943
Wang, Mingmei, Kushner, Mark J. (2010) High energy electron fluxes in dc-augmented capacitively coupled plasmas I. Fundamental characteristics. Journal of Applied Physics, 107 (2). 23308pp. doi:10.1063/1.3290870
Ranjan, Alok, Ventzek, Peter L. G. (2019) Simulations of hybrid direct current radiofrequency (dc/rf) capacitively coupled plasmas. Japanese Journal of Applied Physics, 58 (3) 36001 doi:10.7567/1347-4065/aafc20
Economou, Demetre J. (2007) Fundamentals and applications of ion–ion plasmas. Applied Surface Science, 253. 6672-6680 doi:10.1016/j.apsusc.2007.02.004
 
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