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Volkov, P. V., Goryunov, A. V., Luk’yanov, A. Yu., Tertyshnik, A. D. (2015) Measurements of the semiconductor substrate thickness with a low-coherence tandem interferometer at a nonstationary temperature. Technical Physics Letters, 41. 110-112 doi:10.1134/s1063785015020133

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Reference TypeJournal (article/letter/editorial)
TitleMeasurements of the semiconductor substrate thickness with a low-coherence tandem interferometer at a nonstationary temperature
JournalTechnical Physics Letters
AuthorsVolkov, P. V.Author
Goryunov, A. V.Author
Luk’yanov, A. Yu.Author
Tertyshnik, A. D.Author
Year2015 (February)Volume41
PublisherPleiades Publishing Ltd
DOIdoi:10.1134/s1063785015020133Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID6208835Long-form Identifiermindat:1:5:6208835:6
GUID0
Full ReferenceVolkov, P. V., Goryunov, A. V., Luk’yanov, A. Yu., Tertyshnik, A. D. (2015) Measurements of the semiconductor substrate thickness with a low-coherence tandem interferometer at a nonstationary temperature. Technical Physics Letters, 41. 110-112 doi:10.1134/s1063785015020133
Plain TextVolkov, P. V., Goryunov, A. V., Luk’yanov, A. Yu., Tertyshnik, A. D. (2015) Measurements of the semiconductor substrate thickness with a low-coherence tandem interferometer at a nonstationary temperature. Technical Physics Letters, 41. 110-112 doi:10.1134/s1063785015020133
In(n.d.) Technical Physics Letters Vol. 41. Pleiades Publishing Ltd

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