Schmitt, J.P.M. (1983) Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition. Journal of Non-Crystalline Solids, 59. 649-657 doi:10.1016/0022-3093(83)90257-0
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Schmitt, J.P.M. | Author | |
| Year | 1983 (December) | Volume | 59 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0022-3093(83)90257-0Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 620379 | Long-form Identifier | mindat:1:5:620379:9 |
| GUID | 0 | ||
| Full Reference | Schmitt, J.P.M. (1983) Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition. Journal of Non-Crystalline Solids, 59. 649-657 doi:10.1016/0022-3093(83)90257-0 | ||
| Plain Text | Schmitt, J.P.M. (1983) Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition. Journal of Non-Crystalline Solids, 59. 649-657 doi:10.1016/0022-3093(83)90257-0 | ||
| In | (1983) Journal of Non-Crystalline Solids Vol. 59. Elsevier BV | ||
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