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Smith, Matthew J., Winkler, Mark, Sher, Meng-Ju, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2011) The effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon. Applied Physics A, 105. 795-800 doi:10.1007/s00339-011-6651-2

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Reference TypeJournal (article/letter/editorial)
TitleThe effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon
JournalApplied Physics A
AuthorsSmith, Matthew J.Author
Winkler, MarkAuthor
Sher, Meng-JuAuthor
Lin, Yu-TingAuthor
Mazur, EricAuthor
Gradečak, SilvijaAuthor
Year2011 (December)Volume105
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1007/s00339-011-6651-2Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID6015477Long-form Identifiermindat:1:5:6015477:0
GUID0
Full ReferenceSmith, Matthew J., Winkler, Mark, Sher, Meng-Ju, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2011) The effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon. Applied Physics A, 105. 795-800 doi:10.1007/s00339-011-6651-2
Plain TextSmith, Matthew J., Winkler, Mark, Sher, Meng-Ju, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2011) The effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon. Applied Physics A, 105. 795-800 doi:10.1007/s00339-011-6651-2
In(2011) Applied Physics A Vol. 105. Springer Science and Business Media LLC

See Also

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Smith, Matthew J., Sher, Meng-Ju, Franta, Benjamin, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2014) Improving dopant incorporation during femtosecond-laser doping of Si with a Se thin-film dopant precursor. Applied Physics A, 114. 1009-1016 doi:10.1007/s00339-013-7673-8
Smith, Matthew J., Lin, Yu-Ting, Sher, Meng-Ju, Winkler, Mark T., Mazur, Eric, Gradečak, Silvija (2011) Pressure-induced phase transformations during femtosecond-laser doping of silicon. Journal of Applied Physics, 110 (5). 53524pp. doi:10.1063/1.3633528
Winkler, Mark T., Sher, Meng-Ju, Lin, Yu-Ting, Smith, Matthew J., Zhang, Haifei, Gradečak, Silvija, Mazur, Eric (2012) Studying femtosecond-laser hyperdoping by controlling surface morphology. Journal of Applied Physics, 111 (9). 93511pp. doi:10.1063/1.4709752
Smith, Matthew J., Sher, Meng-Ju, Franta, Benjamin, Lin, Yu-Ting, Mazur, Eric, Gradečak, Silvija (2012) The origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation. Journal of Applied Physics, 112 (8). 83518pp. doi:10.1063/1.4759140
Sher, Meng-Ju, Mangan, Niall M., Smith, Matthew J., Lin, Yu-Ting, Marbach, Sophie, Schneider, Tobias M., Gradečak, Silvija, Brenner, Michael P., Mazur, Eric (2015) Femtosecond-laser hyperdoping silicon in an SF6 atmosphere: Dopant incorporation mechanism. Journal of Applied Physics, 117 (12). 125301pp. doi:10.1063/1.4914520
Haberfehlner, Georg, Smith, Matthew J., Idrobo, Juan-Carlos, Auvert, Geoffroy, Sher, Meng-Ju, Winkler, Mark T., Mazur, Eric, Gambacorti, Narciso, Gradečak, Silvija, Bleuet, Pierre (2013) Selenium Segregation in Femtosecond-Laser Hyperdoped Silicon Revealed by Electron Tomography. Microscopy and Microanalysis, 19 (3). 716-725 doi:10.1017/s1431927613000342
Smith, Matthew J., Sher, Meng-Ju, Franta, Ben, Lin, Yu-Ting, Mazur, Eric, Gradečak, S. (2013) Response to “Comment on ‘The origins of pressure-induced phase transitions during the surface texturing of silicon using femtosecond laser irradiation’” [J. Appl. Phys. 113, 126102 (2013)]. Journal of Applied Physics, 113 (12). 126103pp. doi:10.1063/1.4796126
Fabbri, Filippo, Lin, Yu-Ting, Bertoni, Giovanni, Rossi, Francesca, Smith, Matthew J., Gradečak, Silvija, Mazur, Eric, Salviati, Giancarlo (2015) Origin of the visible emission of black silicon microstructures. Applied Physics Letters, 107 (2). 21907pp. doi:10.1063/1.4926912
Sher, Meng-Ju, Lin, Yu-Ting, Winkler, Mark T., Mazur, Eric, Pruner, Christian, Asenbaum, Augustinus (2013) Mid-infrared absorptance of silicon hyperdoped with chalcogen via fs-laser irradiation. Journal of Applied Physics, 113 (6). 63520pp. doi:10.1063/1.4790808
Sher, Meng-Ju, Mazur, Eric (2014) Intermediate band conduction in femtosecond-laser hyperdoped silicon. Applied Physics Letters, 105 (3). 32103pp. doi:10.1063/1.4890618
Newman, Bonna K., Ertekin, Elif, Sullivan, Joseph T., Winkler, Mark T., Marcus, Matthew A., Fakra, Sirine C., Sher, Meng-Ju, Mazur, Eric, Grossman, Jeffrey C., Buonassisi, Tonio (2013) Extended X-ray absorption fine structure spectroscopy of selenium-hyperdoped silicon. Journal of Applied Physics, 114 (13). 133507pp. doi:10.1063/1.4824279
 
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