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Rius, Gemma (2014) Technology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 341. 37-43 doi:10.1016/j.nimb.2014.06.034

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Reference TypeJournal (article/letter/editorial)
TitleTechnology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition
JournalNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
AuthorsRius, GemmaAuthor
Year2014 (December)Volume341
PublisherElsevier BV
DOIdoi:10.1016/j.nimb.2014.06.034Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5650367Long-form Identifiermindat:1:5:5650367:8
GUID0
Full ReferenceRius, Gemma (2014) Technology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 341. 37-43 doi:10.1016/j.nimb.2014.06.034
Plain TextRius, Gemma (2014) Technology basis and perspectives on focused electron beam induced deposition and focused ion beam induced deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 341. 37-43 doi:10.1016/j.nimb.2014.06.034
In(2014) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 341. Elsevier BV

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Matsui, Shinji (2007) Focused-ion-beam deposition for 3-D nanostructure fabrication. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 257 (1). 758-764 doi:10.1016/j.nimb.2007.01.077
Overwijk, M.H.F., van den Heuvel, F.C. (1993) Focused-ion-beam-induced tungsten deposition: theory and experiment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 80. 1324-1327 doi:10.1016/0168-583x(93)90792-5
Tripathi, Sarvesh K., Rajput, Nitul S., Shukla, Neeraj (2012) Focused ion beam assisted deposition of nanostructures at elevated substrate temperatures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 288. 6-9 doi:10.1016/j.nimb.2012.07.019
Kenji, Gamo, Susumu, Namba (1991) Recent advance of focused ion beam technology in maskless deposition and patterning. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 59. 190-196 doi:10.1016/0168-583x(91)95203-p
Tripathi, Sarvesh K., Kulkarni, Vishwas N. (2009) Evolution of surface morphology of nano and micro structures during focused ion beam induced growth. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 267 (8). 1381-1385 doi:10.1016/j.nimb.2009.01.050
Mitsuishi, K., Shimojo, M., Tanaka, M., Furuya, K. (2006) Nano-fabrication using electron-beam-induced deposition combined with low energy ion milling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 242 (1). 244-246 doi:10.1016/j.nimb.2005.08.022
Park, Y.K, Takai, M, Lehrer, C, Frey, L, Ryssel, H (1999) Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 158 (1). 493-498 doi:10.1016/s0168-583x(99)00501-7
Bischoff, L. (2008) Application of mass-separated focused ion beams in nano-technology. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 266 (8). 1846-1851 doi:10.1016/j.nimb.2007.12.008
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Saraf, Laxmikant V. (2011) Realization of critical distance during the interplay between re-deposition and secondary sputtering from milling of angular side wall with a focused ion beam. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 269 (13). 1540-1547 doi:10.1016/j.nimb.2011.04.111
 
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