Schell, N., Bøttiger, J., Matz, W., Chevallier, J. (2003) Growth mode and texture development in TiN films during magnetron sputtering – An in situ synchrotron radiation study. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 199. 133-138 doi:10.1016/s0168-583x(02)01397-6
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Growth mode and texture development in TiN films during magnetron sputtering – An in situ synchrotron radiation study | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Schell, N. | Author | |
| Bøttiger, J. | Author | ||
| Matz, W. | Author | ||
| Chevallier, J. | Author | ||
| Year | 2003 (January) | Volume | 199 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/s0168-583x(02)01397-6Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5624490 | Long-form Identifier | mindat:1:5:5624490:6 |
| GUID | 0 | ||
| Full Reference | Schell, N., Bøttiger, J., Matz, W., Chevallier, J. (2003) Growth mode and texture development in TiN films during magnetron sputtering – An in situ synchrotron radiation study. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 199. 133-138 doi:10.1016/s0168-583x(02)01397-6 | ||
| Plain Text | Schell, N., Bøttiger, J., Matz, W., Chevallier, J. (2003) Growth mode and texture development in TiN films during magnetron sputtering – An in situ synchrotron radiation study. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 199. 133-138 doi:10.1016/s0168-583x(02)01397-6 | ||
| In | (2003) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 199. Elsevier BV | ||
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