Scanlon, P.J., Barfoot, K.M., Skensved, P., Whitton, J.L., Calder, I.D., Shepherd, F.R. (1985) Some properties of laser annealed shallow As + implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 342-347 doi:10.1016/0168-583x(85)90578-6
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Some properties of laser annealed shallow As + implanted silicon | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Scanlon, P.J. | Author | |
| Barfoot, K.M. | Author | ||
| Skensved, P. | Author | ||
| Whitton, J.L. | Author | ||
| Calder, I.D. | Author | ||
| Shepherd, F.R. | Author | ||
| Year | 1985 (March) | Volume | 7 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(85)90578-6Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5584059 | Long-form Identifier | mindat:1:5:5584059:0 |
| GUID | 0 | ||
| Full Reference | Scanlon, P.J., Barfoot, K.M., Skensved, P., Whitton, J.L., Calder, I.D., Shepherd, F.R. (1985) Some properties of laser annealed shallow As + implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 342-347 doi:10.1016/0168-583x(85)90578-6 | ||
| Plain Text | Scanlon, P.J., Barfoot, K.M., Skensved, P., Whitton, J.L., Calder, I.D., Shepherd, F.R. (1985) Some properties of laser annealed shallow As + implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 342-347 doi:10.1016/0168-583x(85)90578-6 | ||
| In | (1985) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 7. Elsevier BV | ||
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