Räisänen, J. (1985) The effect of encapsulation on the annealing behaviour of Mg- and Al-implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 334-336 doi:10.1016/0168-583x(85)90576-2
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | The effect of encapsulation on the annealing behaviour of Mg- and Al-implanted silicon | ||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | ||
| Authors | Räisänen, J. | Author | |
| Year | 1985 (March) | Volume | 7 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0168-583x(85)90576-2Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5584052 | Long-form Identifier | mindat:1:5:5584052:7 |
| GUID | 0 | ||
| Full Reference | Räisänen, J. (1985) The effect of encapsulation on the annealing behaviour of Mg- and Al-implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 334-336 doi:10.1016/0168-583x(85)90576-2 | ||
| Plain Text | Räisänen, J. (1985) The effect of encapsulation on the annealing behaviour of Mg- and Al-implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 7. 334-336 doi:10.1016/0168-583x(85)90576-2 | ||
| In | (1985) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Vol. 7. Elsevier BV | ||
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