| Reference Type | Journal (article/letter/editorial) |
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| Title | On the delamination dynamic of sputtered amorphous carbon nitride films |
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| Journal | Journal of Applied Physics |
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| Authors | Peponas, S. | Author |
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| Benlahsen, M. | Author |
| Guedda, M. | Author |
| Year | 2009 (July) | Volume | 106 |
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| Issue | 1 |
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| Publisher | AIP Publishing |
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| DOI | doi:10.1063/1.3156656Search in ResearchGate |
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| Generate Citation Formats |
| Mindat Ref. ID | 5166867 | Long-form Identifier | mindat:1:5:5166867:9 |
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| GUID | 0 |
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| Full Reference | Peponas, S., Benlahsen, M., Guedda, M. (2009) On the delamination dynamic of sputtered amorphous carbon nitride films. Journal of Applied Physics, 106 (1). 13525pp. doi:10.1063/1.3156656 |
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| Plain Text | Peponas, S., Benlahsen, M., Guedda, M. (2009) On the delamination dynamic of sputtered amorphous carbon nitride films. Journal of Applied Physics, 106 (1). 13525pp. doi:10.1063/1.3156656 |
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| In | (2009, July) Journal of Applied Physics Vol. 106 (1) AIP Publishing |
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