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Díaz, B., Abramof, E., Castro, R. M., Ueda, M., Reuther, H. (2007) Strain profile of (001) silicon implanted with nitrogen by plasma immersion. Journal of Applied Physics, 101 (10). 103523pp. doi:10.1063/1.2734957

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Reference TypeJournal (article/letter/editorial)
TitleStrain profile of (001) silicon implanted with nitrogen by plasma immersion
JournalJournal of Applied Physics
AuthorsDíaz, B.Author
Abramof, E.Author
Castro, R. M.Author
Ueda, M.Author
Reuther, H.Author
Year2007 (May 15)Volume101
Issue10
PublisherAIP Publishing
DOIdoi:10.1063/1.2734957Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5145454Long-form Identifiermindat:1:5:5145454:4
GUID0
Full ReferenceDíaz, B., Abramof, E., Castro, R. M., Ueda, M., Reuther, H. (2007) Strain profile of (001) silicon implanted with nitrogen by plasma immersion. Journal of Applied Physics, 101 (10). 103523pp. doi:10.1063/1.2734957
Plain TextDíaz, B., Abramof, E., Castro, R. M., Ueda, M., Reuther, H. (2007) Strain profile of (001) silicon implanted with nitrogen by plasma immersion. Journal of Applied Physics, 101 (10). 103523pp. doi:10.1063/1.2734957
In(2007, May) Journal of Applied Physics Vol. 101 (10) AIP Publishing

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Abramof, E., Beloto, A.F., Ueda, M., Günzel, R., Reuther, H. (2001) Reciprocal space mapping of silicon implanted with nitrogen by plasma immersion ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 175. 229-234 doi:10.1016/s0168-583x(00)00635-2
Abramof, E, Beloto, A.F, Ueda, M, Gomes, G.F, Berni, L.A, Reuther, H (2000) Analysis of X-ray rocking curves in (001) silicon crystals implanted with nitrogen by plasma immersion ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 161. 1054-1057 doi:10.1016/s0168-583x(99)00752-1
Beloto, A.F, Ueda, M, Abramof, E, Senna, J.R, Leite, N.F, da Silva, M.D, Reuther, H (2001) Porous silicon implanted with nitrogen by plasma immersion ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 175. 224-228 doi:10.1016/s0168-583x(00)00617-0
Tan, I H, Ueda, M, Rossi, J O, Diaz, B, Abramof, E, Reuther, H (2007) Nitrogen plasma ion implantation in silicon using short pulse high voltage glow discharges. Journal of Physics D: Applied Physics, 40. 5196-5201 doi:10.1088/0022-3727/40/17/027
Ueda, M., Berni, L. A., Gomes, G. F., Beloto, A. F., Abramof, E., Reuther, H. (1999) Application of a dc glow discharge source with controlled plasma potential in plasma immersion ion implantation. Journal of Applied Physics, 86 (9). 4821-4824 doi:10.1063/1.371448
Ueda, M, Reuther, H, Gunzel, R, Beloto, A.F, Abramof, E, Berni, L.A (2001) High dose nitrogen and carbon shallow implantation in Si by plasma immersion ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 175. 715-720 doi:10.1016/s0168-583x(00)00555-3
Ueda, M., Gomes, G.F., Berni, L.A., Rossi, J.O., Barroso, J.J., Beloto, A.F., Abramof, E., Reuther, H. (2000) Plasma immersion ion implantation using a glow discharge source with controlled plasma potential. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 161. 1064-1068 doi:10.1016/s0168-583x(99)00920-9
Mello, C.B., Ueda, M., Lepienski, C.M., Reuther, H. (2009) Tribological changes on SS304 stainless steel induced by nitrogen plasma immersion ion implantation with and without auxiliary heating. Applied Surface Science, 256. 1461-1465 doi:10.1016/j.apsusc.2009.09.001
Pillaca, E.J.D.M., Ueda, M., Kostov, K.G., Reuther, H. (2012) Study of plasma immersion ion implantation into silicon substrate using magnetic mirror geometry. Applied Surface Science, 258. 9564-9569 doi:10.1016/j.apsusc.2012.05.132
Ueda, M., Reuther, H., Lepienski, C.M. (2005) Comparison of nitrogen ion beam and plasma immersion implantation in Al5052 alloy. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 240 (1). 199-203 doi:10.1016/j.nimb.2005.06.115
Ueda, M., Gomes, G.F., Abramof, E., Reuther, H. (2003) In-line nitrogen PIII/ion nitriding processing of metallic materials. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 206. 749-753 doi:10.1016/s0168-583x(03)00836-x
 
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