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Min, Su Ryun, Cho, Han Na, Noh, Su Jin, Kim, Kee Won, Seo, Sun Ae, Chung, Chee Won (2007) Etch characteristics of magnetic tunnel junction stack using a high density plasma in a HBr/Ar gas. physica status solidi (c), 4 (12). 4416-4420 doi:10.1002/pssc.200777138

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Reference TypeJournal (article/letter/editorial)
TitleEtch characteristics of magnetic tunnel junction stack using a high density plasma in a HBr/Ar gas
Journalphysica status solidi (c)
AuthorsMin, Su RyunAuthor
Cho, Han NaAuthor
Noh, Su JinAuthor
Kim, Kee WonAuthor
Seo, Sun AeAuthor
Chung, Chee WonAuthor
Year2007 (December)Volume4
Issue12
PublisherWiley
DOIdoi:10.1002/pssc.200777138Search in ResearchGate
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Mindat Ref. ID5113396Long-form Identifiermindat:1:5:5113396:0
GUID0
Full ReferenceMin, Su Ryun, Cho, Han Na, Noh, Su Jin, Kim, Kee Won, Seo, Sun Ae, Chung, Chee Won (2007) Etch characteristics of magnetic tunnel junction stack using a high density plasma in a HBr/Ar gas. physica status solidi (c), 4 (12). 4416-4420 doi:10.1002/pssc.200777138
Plain TextMin, Su Ryun, Cho, Han Na, Noh, Su Jin, Kim, Kee Won, Seo, Sun Ae, Chung, Chee Won (2007) Etch characteristics of magnetic tunnel junction stack using a high density plasma in a HBr/Ar gas. physica status solidi (c), 4 (12). 4416-4420 doi:10.1002/pssc.200777138
In(2007, December) physica status solidi (c) Vol. 4 (12) Wiley

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Hyun Park, Ik, Ryun Min, Su, Hyun Park, Wang, Ho Shin, Kyung, Chung, Chee Won (2006) Nanometer-sized etching of magnetic tunnel junction stack for magnetic random access memory. Journal of Magnetism and Magnetic Materials, 304. doi:10.1016/j.jmmm.2006.01.130
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