Alexandrova, S., Szekeres, A. (1999) Charged Defects in Wet SiO2/Si Structure Modified by RF Oxygen Plasma Treatment. physica status solidi (a), 171 (2). 487-493 doi:10.1002/(sici)1521-396x(199902)171:2<487::aid-pssa487>3.0.co;2-0
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Charged Defects in Wet SiO2/Si Structure Modified by RF Oxygen Plasma Treatment | ||
| Journal | physica status solidi (a) | ||
| Authors | Alexandrova, S. | Author | |
| Szekeres, A. | Author | ||
| Year | 1999 (February) | Volume | 171 |
| Issue | 2 | ||
| Publisher | Wiley | ||
| DOI | doi:10.1002/(sici)1521-396x(199902)171:2<487::aid-pssa487>3.0.co;2-0Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 5084093 | Long-form Identifier | mindat:1:5:5084093:9 |
| GUID | 0 | ||
| Full Reference | Alexandrova, S., Szekeres, A. (1999) Charged Defects in Wet SiO2/Si Structure Modified by RF Oxygen Plasma Treatment. physica status solidi (a), 171 (2). 487-493 doi:10.1002/(sici)1521-396x(199902)171:2<487::aid-pssa487>3.0.co;2-0 | ||
| Plain Text | Alexandrova, S., Szekeres, A. (1999) Charged Defects in Wet SiO2/Si Structure Modified by RF Oxygen Plasma Treatment. physica status solidi (a), 171 (2). 487-493 doi:10.1002/(sici)1521-396x(199902)171:23.0.co;2-0 | ||
| In | (1999, February) physica status solidi (a) Vol. 171 (2) Wiley | ||
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