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Kambham, Ajay Kumar, Kumar, Arul, Gilbert, Matthieu, Vandervorst, Wilfried (2013) 3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography. Ultramicroscopy, 132. 65-69 doi:10.1016/j.ultramic.2012.09.013

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Reference TypeJournal (article/letter/editorial)
Title3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography
JournalUltramicroscopy
AuthorsKambham, Ajay KumarAuthor
Kumar, ArulAuthor
Gilbert, MatthieuAuthor
Vandervorst, WilfriedAuthor
Year2013 (September)Volume132
PublisherElsevier BV
DOIdoi:10.1016/j.ultramic.2012.09.013Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID4908263Long-form Identifiermindat:1:5:4908263:6
GUID0
Full ReferenceKambham, Ajay Kumar, Kumar, Arul, Gilbert, Matthieu, Vandervorst, Wilfried (2013) 3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography. Ultramicroscopy, 132. 65-69 doi:10.1016/j.ultramic.2012.09.013
Plain TextKambham, Ajay Kumar, Kumar, Arul, Gilbert, Matthieu, Vandervorst, Wilfried (2013) 3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography. Ultramicroscopy, 132. 65-69 doi:10.1016/j.ultramic.2012.09.013
In(2013) Ultramicroscopy Vol. 132. Elsevier BV

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Kumar, Arul, Gencarelli, Federica, Kambham, Ajay Kumar, Gilbert, Matthieu, Vincent, Benjamin, Vandervorst, Wilfried (2012) Study of Sn migration during relaxation of Ge1-xSnxlayers using atom probe tomography. physica status solidi (c), 9 (10). 1924-1930 doi:10.1002/pssc.201200222
Gilbert, M., Vandervorst, W., Koelling, S., Kambham, A.K. (2011) Atom probe analysis of a 3D finFET with high-k metal gate. Ultramicroscopy, 111 (6). 530-534 doi:10.1016/j.ultramic.2010.12.025
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Kambham, A.K., Mody, J., Gilbert, M., Koelling, S., Vandervorst, W. (2011) Atom-probe for FinFET dopant characterization. Ultramicroscopy, 111 (6). 535-539 doi:10.1016/j.ultramic.2011.01.017
Bogdanowicz, J., Kumar, A., Fleischmann, C., Gilbert, M., Houard, J., Vella, A., Vandervorst, W. (2018) Laser-assisted atom probe tomography of semiconductors: The impact of the focused-ion beam specimen preparation. Ultramicroscopy, 188. 19-23 doi:10.1016/j.ultramic.2018.03.001
Koelling, S., Innocenti, N., Hellings, G., Gilbert, M., Kambham, A.K., De Meyer, K., Vandervorst, W. (2011) Characteristics of cross-sectional atom probe analysis on semiconductor structures. Ultramicroscopy, 111 (6). 540-545 doi:10.1016/j.ultramic.2011.01.004
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Barroo, Cédric, Akey, Austin J., Bell, David C. (2020) Aggregated nanoparticles: Sample preparation and analysis by atom probe tomography. Ultramicroscopy, 218. 113082pp. doi:10.1016/j.ultramic.2020.113082
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