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Cavallotti, Carlo, Masi, Maurizio, Carrà, Sergio (2000) Gas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective. Materials Chemistry and Physics, 66. 197-200 doi:10.1016/s0254-0584(00)00320-5

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Reference TypeJournal (article/letter/editorial)
TitleGas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective
JournalMaterials Chemistry and Physics
AuthorsCavallotti, CarloAuthor
Masi, MaurizioAuthor
Carrà, SergioAuthor
Year2000 (October)Volume66
PublisherElsevier BV
DOIdoi:10.1016/s0254-0584(00)00320-5Search in ResearchGate
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Mindat Ref. ID3051990Long-form Identifiermindat:1:5:3051990:7
GUID0
Full ReferenceCavallotti, Carlo, Masi, Maurizio, Carrà, Sergio (2000) Gas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective. Materials Chemistry and Physics, 66. 197-200 doi:10.1016/s0254-0584(00)00320-5
Plain TextCavallotti, Carlo, Masi, Maurizio, Carrà, Sergio (2000) Gas phase and surface kinetic schemes for metal organic chemical vapor deposition processes: a theoretical perspective. Materials Chemistry and Physics, 66. 197-200 doi:10.1016/s0254-0584(00)00320-5
In(2000, October) Materials Chemistry and Physics Vol. 66 (2) Elsevier BV

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Masi, Maurizio, Bertani, Valeria, Cavallotti, Carlo, Carrà, Sergio (2000) Towards a multiscale approach to the growth of silicon films by chemical vapor deposition. Materials Chemistry and Physics, 66. 229-235 doi:10.1016/s0254-0584(00)00323-0
Di Muzio, Fausto, Masi, Maurizio, Carrà, Sergio (2000) Modeling of aerosol deposition of titania thin films. Materials Chemistry and Physics, 66. 286-293 doi:10.1016/s0254-0584(00)00311-4
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Cavallotti, Carlo, Moscatelli, Davide, Masi, Maurizio, Carrà, Sergio (2004) Accelerated decomposition of gas phase metal organic molecules determined by radical reactions. Journal of Crystal Growth, 266 (1). 363-370 doi:10.1016/j.jcrysgro.2004.02.067
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Rondanini, Maurizio, Cavallotti, Carlo, Moscatelli, Davide, Masi, Maurizio, Carrà, Sergio (2004) A combined fluid dynamic and 3D kinetic Monte Carlo investigation of the selective deposition of GaAs and InP. Journal of Crystal Growth, 272 (1). 52-58 doi:10.1016/j.jcrysgro.2004.08.051
Attolini, G, Carrà, S, Di Muzio, F, Fornari, R, Masi, M, Pelosi, C (2000) A vertical reactor for deposition of gallium nitride. Materials Chemistry and Physics, 66. 213-218 doi:10.1016/s0254-0584(00)00327-8
Masi, Maurizio, Cavallotti, Carlo, Carrà, Sergio (1998) Different approaches for methane plasmas modeling. Chemical Engineering Science, 53 (22). 3875-3886 doi:10.1016/s0009-2509(98)00197-3
Bertani, Valeria, Cavallotti, Carlo, Masi, Maurizio, Carrà, Sergio (2000) Density Functional Study of the Interaction of Palladium Clusters with Hydrogen and CHxSpecies. The Journal of Physical Chemistry A, 104 (48). 11390-11397 doi:10.1021/jp002218d
Valente, Gianluca, Cavallotti, Carlo, Masi, Maurizio, Carrà, Sergio (2001) Reduced order model for the CVD of epitaxial silicon from silane and chlorosilanes. Journal of Crystal Growth, 230 (1). 247-257 doi:10.1016/s0022-0248(01)01349-5
(2000) Index. Materials Chemistry and Physics, 66. 325-329 doi:10.1016/s0254-0584(00)00406-5
 
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