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Moon, Jong, Ito, Toshimichi, Ma, Jing Sheng, Hiraki, Akio (1991) Formation of TiN by nitridation of magnetron sputtered Ti films using microwave plasma CVD. Journal of Crystal Growth, 115 (1). 589-595 doi:10.1016/0022-0248(91)90809-j

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Reference TypeJournal (article/letter/editorial)
TitleFormation of TiN by nitridation of magnetron sputtered Ti films using microwave plasma CVD
JournalJournal of Crystal Growth
AuthorsMoon, JongAuthor
Ito, ToshimichiAuthor
Ma, Jing ShengAuthor
Hiraki, AkioAuthor
Year1991 (December)Volume115
Issue1
PublisherElsevier BV
DOIdoi:10.1016/0022-0248(91)90809-jSearch in ResearchGate
Generate Citation Formats
Mindat Ref. ID2804201Long-form Identifiermindat:1:5:2804201:3
GUID0
Full ReferenceMoon, Jong, Ito, Toshimichi, Ma, Jing Sheng, Hiraki, Akio (1991) Formation of TiN by nitridation of magnetron sputtered Ti films using microwave plasma CVD. Journal of Crystal Growth, 115 (1). 589-595 doi:10.1016/0022-0248(91)90809-j
Plain TextMoon, Jong, Ito, Toshimichi, Ma, Jing Sheng, Hiraki, Akio (1991) Formation of TiN by nitridation of magnetron sputtered Ti films using microwave plasma CVD. Journal of Crystal Growth, 115 (1). 589-595 doi:10.1016/0022-0248(91)90809-j
In(1991, December) Journal of Crystal Growth Vol. 115 (1) Elsevier BV

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Yokota, Yoshihiro, Kawarada, Hiroshi, Ma, Jing Sheng, Nishimura, Kazuhito, Hiraki, Akio (1990) Cathodoluminescence imaging of semiconducting diamond formed by plasma CVD. Journal of Crystal Growth, 103 (1). 65-70 doi:10.1016/0022-0248(90)90171-g
Hasegawa, Shigehiko, Maehashi, Kenzo, Nakashima, Hisao, Ito, Toshimichi, Hiraki, Akio (1989) Growth and characterization of GaAs films on porous Si. Journal of Crystal Growth, 95 (1). 113-116 doi:10.1016/0022-0248(89)90362-x
Wei, Jin, Kawarada, Hiroshi, Suzuki, Jun-ichi, Hiraki, Akio (1990) Growth of diamond films at low pressure using magneto-microwave plasma CVD. Journal of Crystal Growth, 99 (1). 1201-1205 doi:10.1016/s0022-0248(08)80108-x
Sheng^Ma, Jing, Kawarada, Hiroshi, Yonehara, Takao, Suzuki, Jun-ichi, Yokota, Yoshihiro, Hiraki, Akio (1990) Nucleation control and selective growth of diamond particles formed with plasma CVD. Journal of Crystal Growth, 99 (1). 1206-1210 doi:10.1016/s0022-0248(08)80109-1
Nakao, Setsuo, Watatani, Hirohumi, Maruno, Shigeo, Noda, Mikio (1991) Effects of discharge current and substrate temperature on the microstructure of diamond films deposited by DC plasma CVD. Journal of Crystal Growth, 115 (1). 313-317 doi:10.1016/0022-0248(91)90760-3
Deguchi, Masahiro, Kitabatake, Makoto, Hirao, Takashi, Mori, Yusuke, Ma, Jing Sheng, Ito, Toshimichi, Hiraki, Akio (1992) Diamond growth on carbon-implanted silicon. Applied Surface Science, 60. 291-295 doi:10.1016/0169-4332(92)90431-v
Sasaki, Akio (1991) Optical and luminescence properties of disordered superlattices. Journal of Crystal Growth, 115 (1). 490-497 doi:10.1016/0022-0248(91)90792-4
Imaizumi, T., Seiwa, M., Oda, O. (1991) Delta-doped GaAs grown by chloride CVD. Journal of Crystal Growth, 115 (1). 443-447 doi:10.1016/0022-0248(91)90783-2
Kawai, Jun, Ito, Hiroshi, Hara, Kunihiko (1991) MOVPE growth of GaAs using metallic arsenic and trimethylgallium. Journal of Crystal Growth, 115 (1). 216-220 doi:10.1016/0022-0248(91)90741-m
Jeon, Hyeongmin, Hatta, Akimitsu, Suzuki, Hidetoshi, Ito, Toshimichi, Sasaki, Takatomo, Lee, Chongmu, Hiraki, Akio (1997) Large area diamond nucleation on Si(001) using magnetoactive microwave plasma CVD. Applied Surface Science, 113. 244-248 doi:10.1016/s0169-4332(96)00815-x
Yara, Takuya, Yuasa, Motokazu, Sheng Ma, Jing, Suzuki, Jun-ichi, Okada, Shigesupbu, Hiraki, Akio (1992) Fabrication of diamond films by a magneto-active plasma CVD using alcohol-hydrogen system. Applied Surface Science, 60. 308-316 doi:10.1016/0169-4332(92)90434-y
 
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