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Liu, Xiao Peng, Chen, Xiao Chun, Li, Qing Zhong (2011) Principle and Experiment of Ultrasonic Subtle Atomization in CMP. Advanced Materials Research, 279. 287-290 doi:10.4028/www.scientific.net/amr.279.287

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Reference TypeJournal (article/letter/editorial)
TitlePrinciple and Experiment of Ultrasonic Subtle Atomization in CMP
JournalAdvanced Materials Research
AuthorsLiu, Xiao PengAuthor
Chen, Xiao ChunAuthor
Li, Qing ZhongAuthor
Year2011 (July)Volume279
PublisherTrans Tech Publications, Ltd.
DOIdoi:10.4028/www.scientific.net/amr.279.287Search in ResearchGate
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Mindat Ref. ID11648189Long-form Identifiermindat:1:5:11648189:6
GUID0
Full ReferenceLiu, Xiao Peng, Chen, Xiao Chun, Li, Qing Zhong (2011) Principle and Experiment of Ultrasonic Subtle Atomization in CMP. Advanced Materials Research, 279. 287-290 doi:10.4028/www.scientific.net/amr.279.287
Plain TextLiu, Xiao Peng, Chen, Xiao Chun, Li, Qing Zhong (2011) Principle and Experiment of Ultrasonic Subtle Atomization in CMP. Advanced Materials Research, 279. 287-290 doi:10.4028/www.scientific.net/amr.279.287
In(n.d.) Advanced Materials Research Vol. 279. Trans Tech Publications, Ltd.

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