Vanmathi, M, Ismail, M Mohamed, Kumar, M Senthil (2019) Optimization of RF sputtering process parameters on electrical resistivity, deposition rate and sensitivity of Al-doped ZnO thin films grown on Si substrate using grey-Taguchi technique. Bulletin of Materials Science, 42. doi:10.1007/s12034-019-1800-x

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	Xu, J. W., Wang, H., Jiang, M. H., Liu, X. Y. (2010) Properties of Nb-doped ZnO transparent conductive thin films deposited by rf magnetron sputtering using a high quality ceramic target. Bulletin of Materials Science, 33. 119-122 doi:10.1007/s12034-010-0016-x
	Vispute, R D, Bendre, S T, Viswanathan, R, Chaudhari, S M, Kanetkar, S M, Ogale, S B (1991) Process parameters optimization for laser deposition of highT c superconducting thin films on Si and other substrate materials. Bulletin of Materials Science, 14. 443-449 doi:10.1007/bf02747354
	SIVAKUMAR, K, SENTHIL KUMAR, V, MUTHUKUMARASAMY, N, THAMBIDURAI, M, SENTHIL, T S (2012) Influence of pH on ZnO nanocrystalline thin films prepared by sol–gel dip coating method. Bulletin of Materials Science, 35. 327-331 doi:10.1007/s12034-012-0305-7
	ZENDEHNAM, A, MIRZAEE, M, MIRI, S (2014) Influence of deposition rate on PL spectrum and surface morphology of ZnO nanolayers deposited on Si (100) substrate. Bulletin of Materials Science, 37. 179-183 doi:10.1007/s12034-014-0638-5
	Choi, Yong-Keun, Kim, Kyeong Min, Jang, Yongcheol, Jeong, Hakyung, Singh, Vijay, Rangarajulu, Senthil Kumaran (2019) Investigations on the ZnO- and Cr-doped ZnO powders. Bulletin of Materials Science, 42. doi:10.1007/s12034-019-1832-2
	Angadi, M. A., Ashrit, P. V. (1983) The effect of substrate temperature, deposition rate and annealing on the electrical resistivity of thin yttrium films. Journal of Materials Science, 18. 3177-3182 doi:10.1007/bf00544140
	(2017) Effect of Ar ion-beam-assistance and substrate temperature on physical properties of Al-doped ZnO thin films deposited by RF magnetron sputtering. Materials Research Bulletin, 95. 451-458 doi:10.1016/j.materresbull.2017.07.034
	El Rouby, Waleed M A, Al-Ghamdi, Attieh A, Abdel-wahab, M Sh, Jilani, Asim (2018) Sunlight-enhanced catalytic degradation over Ag–CuO nanoparticles thin films prepared by DC/RF sputtering technique. Bulletin of Materials Science, 41. doi:10.1007/s12034-018-1548-8
	FAISAL, ABDULQADER D (2016) Optimization of CVD parameters for long ZnO NWs grown on ITO/glass substrate. Bulletin of Materials Science, 39. 1635-1643 doi:10.1007/s12034-016-1316-6
	Kumar, G Anil, Reddy, M V Ramana, Reddy, Katta Narasimha (2012) Effect of annealing on ZnO thin films grown on quartz substrate by RF magnetron sputtering. Journal of Physics: Conference Series, 365. 12031pp. doi:10.1088/1742-6596/365/1/012031