Saito, N. (1989) Effect of hydrocarbon gas on the properties of magnetron sputtering of amorphous SiC:H. Journal of Non-Crystalline Solids, 108 (2) 211-215 doi:10.1016/0022-3093(89)90586-3
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Effect of hydrocarbon gas on the properties of magnetron sputtering of amorphous SiC:H | ||
| Journal | Journal of Non-Crystalline Solids | ||
| Authors | Saito, N. | Author | |
| Year | 1989 (March) | Volume | 108 |
| Issue | 2 | ||
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/0022-3093(89)90586-3Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 628757 | Long-form Identifier | mindat:1:5:628757:7 |
| GUID | 0 | ||
| Full Reference | Saito, N. (1989) Effect of hydrocarbon gas on the properties of magnetron sputtering of amorphous SiC:H. Journal of Non-Crystalline Solids, 108 (2) 211-215 doi:10.1016/0022-3093(89)90586-3 | ||
| Plain Text | Saito, N. (1989) Effect of hydrocarbon gas on the properties of magnetron sputtering of amorphous SiC:H. Journal of Non-Crystalline Solids, 108 (2) 211-215 doi:10.1016/0022-3093(89)90586-3 | ||
| In | (1989, March) Journal of Non-Crystalline Solids Vol. 108 (2) Elsevier BV | ||
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